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Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

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ABSTRACT

(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.

No MeSH data available.


Laser microscope images of quartz substrates with patterned metal oxide films on both sides deposited by two-tone patterning Method A.
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nanomaterials-02-00312-f009: Laser microscope images of quartz substrates with patterned metal oxide films on both sides deposited by two-tone patterning Method A.

Mentions: The dual-side patterned films in Table 2 were produced by Method A and B. Selected laser microscope images of samples produced using Method A are displayed in Figure 9. Figure 10 shows the profile of a 0.3 mm line of 1-InSn and 2-InSn films on each side of a quartz substrate before and after pyrolysis at 500 °C. The final results of either method for production of films in Table 2 were found to be equivalent. In Method A, after side-1 was exposed, side-2 was coated and dried at 100–120 °C. Despite the exposure to elevated temperature, the irradiated material on side-1 was completely removed upon developing in all cases examined. This exhibits the thermally inert nature of the photoproduct and compatibility of these compounds to this method. The electrical and optical properties and analysis of the respective ITO or TiO2 films formed by pyrolysis of the InSn and Ti complexes under these conditions have been reported [4].


Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems
Laser microscope images of quartz substrates with patterned metal oxide films on both sides deposited by two-tone patterning Method A.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC5304597&req=5

nanomaterials-02-00312-f009: Laser microscope images of quartz substrates with patterned metal oxide films on both sides deposited by two-tone patterning Method A.
Mentions: The dual-side patterned films in Table 2 were produced by Method A and B. Selected laser microscope images of samples produced using Method A are displayed in Figure 9. Figure 10 shows the profile of a 0.3 mm line of 1-InSn and 2-InSn films on each side of a quartz substrate before and after pyrolysis at 500 °C. The final results of either method for production of films in Table 2 were found to be equivalent. In Method A, after side-1 was exposed, side-2 was coated and dried at 100–120 °C. Despite the exposure to elevated temperature, the irradiated material on side-1 was completely removed upon developing in all cases examined. This exhibits the thermally inert nature of the photoproduct and compatibility of these compounds to this method. The electrical and optical properties and analysis of the respective ITO or TiO2 films formed by pyrolysis of the InSn and Ti complexes under these conditions have been reported [4].

View Article: PubMed Central - PubMed

ABSTRACT

(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.

No MeSH data available.