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Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

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ABSTRACT

(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.

No MeSH data available.


Photo-cleavage of nitrobenzyl ester derived complexes to produce carboxylic acid moiety bearing complexes [4].
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nanomaterials-02-00312-f001: Photo-cleavage of nitrobenzyl ester derived complexes to produce carboxylic acid moiety bearing complexes [4].

Mentions: We have reported a dual-function type of metal chelate complex that as a film can both be directly pattered and perform as a metal oxide precursor. This was accomplished with ortho nitrobenzyl esters of protocatechuic acid, 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC; 1) and 4-(6-nitroveratryloxycarbonyl)catechol (NVOC; 2), metal complexes, where the corresponding protocatechuic acid complex was generated by the photo-induced cleavage of the ester (Figure 1) [4]. Contrast that can be used for patterning was achieved based on the selectively aqueous base soluble photo-generated carboxylic acid moiety bearing complex. The photoreaction has been confirmed by the extraction and characterization of the protocatechuic acid complex from irradiated films. In a following investigation, the photoreaction of free ligands and related derivatives has been monitored by NMR and the generation of the corresponding carboxylic acid was confirmed [5]. In that report, the relative dynamics of the photoreaction that occurs in the nitrobenzyl esters, related compounds and complexes under irradiation by a super high-pressure mercury lamp has been characterized.


Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems
Photo-cleavage of nitrobenzyl ester derived complexes to produce carboxylic acid moiety bearing complexes [4].
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC5304597&req=5

nanomaterials-02-00312-f001: Photo-cleavage of nitrobenzyl ester derived complexes to produce carboxylic acid moiety bearing complexes [4].
Mentions: We have reported a dual-function type of metal chelate complex that as a film can both be directly pattered and perform as a metal oxide precursor. This was accomplished with ortho nitrobenzyl esters of protocatechuic acid, 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC; 1) and 4-(6-nitroveratryloxycarbonyl)catechol (NVOC; 2), metal complexes, where the corresponding protocatechuic acid complex was generated by the photo-induced cleavage of the ester (Figure 1) [4]. Contrast that can be used for patterning was achieved based on the selectively aqueous base soluble photo-generated carboxylic acid moiety bearing complex. The photoreaction has been confirmed by the extraction and characterization of the protocatechuic acid complex from irradiated films. In a following investigation, the photoreaction of free ligands and related derivatives has been monitored by NMR and the generation of the corresponding carboxylic acid was confirmed [5]. In that report, the relative dynamics of the photoreaction that occurs in the nitrobenzyl esters, related compounds and complexes under irradiation by a super high-pressure mercury lamp has been characterized.

View Article: PubMed Central - PubMed

ABSTRACT

(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.

No MeSH data available.