Limits...
Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.


Density profile of a Rh nanocrystalline film.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
getmorefigures.php?uid=PMC5036461&req=5

Figure 6: Density profile of a Rh nanocrystalline film.

Mentions: The density profiles of Rh nanocrystalline coatings were measured along a cross-section exploiting both the coating method and the substrate method. Density was calculated from areal density, and thickness values were measured in the very same points. The results reported in figure 6 refer to a Rh film with a non-uniform thickness profile and thickness ranging from about 70 to 135 nm. A non-uniform density profile is evident for both methods. Film density is approximately constant in the central region of the sample, while a 15% decrement is observed in the peripheral deposit region, where the film thickness is lower than 70 nm. As the film was deposited in vacuum [22], the coating density was expected to be very close to the bulk density value for Rh (). In the central region of the coated surface, film density measured by the substrate method is around , while the coating method gives a density of about . In both cases density is underestimated with respect to the expected value. Since the results achieved by the substrate method are closer to the expected film density, the substrate method can be considered more reliable than the coating method in this case.


Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation
Density profile of a Rh nanocrystalline film.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC5036461&req=5

Figure 6: Density profile of a Rh nanocrystalline film.
Mentions: The density profiles of Rh nanocrystalline coatings were measured along a cross-section exploiting both the coating method and the substrate method. Density was calculated from areal density, and thickness values were measured in the very same points. The results reported in figure 6 refer to a Rh film with a non-uniform thickness profile and thickness ranging from about 70 to 135 nm. A non-uniform density profile is evident for both methods. Film density is approximately constant in the central region of the sample, while a 15% decrement is observed in the peripheral deposit region, where the film thickness is lower than 70 nm. As the film was deposited in vacuum [22], the coating density was expected to be very close to the bulk density value for Rh (). In the central region of the coated surface, film density measured by the substrate method is around , while the coating method gives a density of about . In both cases density is underestimated with respect to the expected value. Since the results achieved by the substrate method are closer to the expected film density, the substrate method can be considered more reliable than the coating method in this case.

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.