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Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation

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ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.


Density of Al-doped ZnO films as a function of the target-to-substrate distance.
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Figure 5: Density of Al-doped ZnO films as a function of the target-to-substrate distance.

Mentions: The possibility of employing EDS for density evaluation in the case of multi-elemental coatings was tested, exploiting aluminium-doped zinc oxide nanostructured films [21]. In this case, the substrate method was chosen due to the unavailability of reference standards with the same composition as the films under analysis. In figure 5, results achieved using the substrate method and QCM are shown as a function of the target-to-substrate distance. In this case, a strong uncertainty affects density values achieved by QCM, because the deposition configurations adopted for film growth and for QCM measurements were not equivalent. However, density trends predicted by QCM are confirmed by the substrate method. Thus, as stated in [21], a decreasing trend in the film density with the target-to-substrate distance is observed.


Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation
Density of Al-doped ZnO films as a function of the target-to-substrate distance.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC5036461&req=5

Figure 5: Density of Al-doped ZnO films as a function of the target-to-substrate distance.
Mentions: The possibility of employing EDS for density evaluation in the case of multi-elemental coatings was tested, exploiting aluminium-doped zinc oxide nanostructured films [21]. In this case, the substrate method was chosen due to the unavailability of reference standards with the same composition as the films under analysis. In figure 5, results achieved using the substrate method and QCM are shown as a function of the target-to-substrate distance. In this case, a strong uncertainty affects density values achieved by QCM, because the deposition configurations adopted for film growth and for QCM measurements were not equivalent. However, density trends predicted by QCM are confirmed by the substrate method. Thus, as stated in [21], a decreasing trend in the film density with the target-to-substrate distance is observed.

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.