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Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation

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ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.


Density of carbon foams as a function of gas pressure in deposition chamber.
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Figure 4: Density of carbon foams as a function of gas pressure in deposition chamber.

Mentions: A second experiment aimed at testing the application of the technique to nanostructured films was performed, exploiting carbon foam densities down to a few [3]. In this case, the substrate method was selected for the reasons discussed in section 2.2. In figure 4, results for both the substrate method and QCM are shown as a function of the gas pressure in the deposition chamber. The agreement between the two methods is satisfactory only for density values above . For lower densities, values measured by QCM are unrealistically low, as QCM undergoes a sensitivity loss due to the very porous foam structure, which results in a decoupling between the film and the quartz crystal resonator [20]. On the contrary, the substrate method shows a more plausible density saturation for increasing gas pressure, which is typical of this kind of deposition process. Thus, EDS-based methods can be applied for films produced by PVD for densities down to a few , also in a density range in which QCM is not reliable.


Energy dispersive x-ray spectroscopy for nanostructured thin film density evaluation
Density of carbon foams as a function of gas pressure in deposition chamber.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC5036461&req=5

Figure 4: Density of carbon foams as a function of gas pressure in deposition chamber.
Mentions: A second experiment aimed at testing the application of the technique to nanostructured films was performed, exploiting carbon foam densities down to a few [3]. In this case, the substrate method was selected for the reasons discussed in section 2.2. In figure 4, results for both the substrate method and QCM are shown as a function of the gas pressure in the deposition chamber. The agreement between the two methods is satisfactory only for density values above . For lower densities, values measured by QCM are unrealistically low, as QCM undergoes a sensitivity loss due to the very porous foam structure, which results in a decoupling between the film and the quartz crystal resonator [20]. On the contrary, the substrate method shows a more plausible density saturation for increasing gas pressure, which is typical of this kind of deposition process. Thus, EDS-based methods can be applied for films produced by PVD for densities down to a few , also in a density range in which QCM is not reliable.

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, we report on two fast and non-destructive methods for nanostructured film density evaluation based on a combination of energy dispersive x-ray spectroscopy for areal density measurement and scanning electron microscopy (SEM) for thickness evaluation. These techniques have been applied to films with density ranging from the density of a solid down to a few , with different compositions and morphologies. The high resolution of an electron microprobe has been exploited to characterize non-uniform films both at the macroscopic scale and at the microscopic scale.

No MeSH data available.