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Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing.

Hui Y, Gomez-Diaz JS, Qian Z, Alù A, Rinaldi M - Nat Commun (2016)

Bottom Line: We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate.The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities.These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical &Computer Engineering at Northeastern University, 360 Huntington Avenue, Boston, Massachusetts 02115, USA.

ABSTRACT
Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading to exciting optical functionalities and applications. Although to date metasurfaces have mainly been investigated from an electromagnetic perspective, their ultrathin nature may also provide novel and useful mechanical properties. Here we propose a thin piezoelectric plasmonic metasurface forming the resonant body of a nanomechanical resonator with simultaneously tailored optical and electromechanical properties. We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate. The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities. These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

No MeSH data available.


Related in: MedlinePlus

Microfabrication process for the plasmonic piezoelectric NEMS resonant infrared detector.A–A′ and B–B′ denote longitudinal and transversal axis of the device, as illustrated in Fig. 1.
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f4: Microfabrication process for the plasmonic piezoelectric NEMS resonant infrared detector.A–A′ and B–B′ denote longitudinal and transversal axis of the device, as illustrated in Fig. 1.

Mentions: The plasmonic piezoelectric resonant infrared detector was fabricated using a post-CMOS compatible microfabrication process involving a combination of photolithography (four masks) and electron-beam lithography (one step), as illustrated in Fig. 4. The fabrication started with a high-resistivity (resistivity >20,000 Ω m) 4-inch silicon wafer: (a) 100-nm-thick Pt was sputter-deposited and patterned by lift-off process to define the bottom IDT; (b) 500-nm-thick high-quality c axis orientated AlN film was sputter-deposited on top of the Pt IDT, and wet etched in H3PO4 to open the vias to get access to the bottom electrode and dry etched by inductively coupled plasma in Cl2-based chemistry to define the shape of the AlN resonator; (c) 100-nm-thick Au was deposited by electron-beam deposition and patterned by lift-off process to define the probing pad; (d) 50-nm-thick Au was deposited by electron-beam deposition and patterned by electron-beam lithography and lift-off process to define the nanoplasmonic metasurface; (e) the Si substrate underneath the resonator was etched by xenon difluoride (XeF2) to completely release the device.


Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing.

Hui Y, Gomez-Diaz JS, Qian Z, Alù A, Rinaldi M - Nat Commun (2016)

Microfabrication process for the plasmonic piezoelectric NEMS resonant infrared detector.A–A′ and B–B′ denote longitudinal and transversal axis of the device, as illustrated in Fig. 1.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4835539&req=5

f4: Microfabrication process for the plasmonic piezoelectric NEMS resonant infrared detector.A–A′ and B–B′ denote longitudinal and transversal axis of the device, as illustrated in Fig. 1.
Mentions: The plasmonic piezoelectric resonant infrared detector was fabricated using a post-CMOS compatible microfabrication process involving a combination of photolithography (four masks) and electron-beam lithography (one step), as illustrated in Fig. 4. The fabrication started with a high-resistivity (resistivity >20,000 Ω m) 4-inch silicon wafer: (a) 100-nm-thick Pt was sputter-deposited and patterned by lift-off process to define the bottom IDT; (b) 500-nm-thick high-quality c axis orientated AlN film was sputter-deposited on top of the Pt IDT, and wet etched in H3PO4 to open the vias to get access to the bottom electrode and dry etched by inductively coupled plasma in Cl2-based chemistry to define the shape of the AlN resonator; (c) 100-nm-thick Au was deposited by electron-beam deposition and patterned by lift-off process to define the probing pad; (d) 50-nm-thick Au was deposited by electron-beam deposition and patterned by electron-beam lithography and lift-off process to define the nanoplasmonic metasurface; (e) the Si substrate underneath the resonator was etched by xenon difluoride (XeF2) to completely release the device.

Bottom Line: We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate.The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities.These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical &Computer Engineering at Northeastern University, 360 Huntington Avenue, Boston, Massachusetts 02115, USA.

ABSTRACT
Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading to exciting optical functionalities and applications. Although to date metasurfaces have mainly been investigated from an electromagnetic perspective, their ultrathin nature may also provide novel and useful mechanical properties. Here we propose a thin piezoelectric plasmonic metasurface forming the resonant body of a nanomechanical resonator with simultaneously tailored optical and electromechanical properties. We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate. The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities. These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

No MeSH data available.


Related in: MedlinePlus