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Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing.

Hui Y, Gomez-Diaz JS, Qian Z, Alù A, Rinaldi M - Nat Commun (2016)

Bottom Line: We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate.The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities.These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical &Computer Engineering at Northeastern University, 360 Huntington Avenue, Boston, Massachusetts 02115, USA.

ABSTRACT
Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading to exciting optical functionalities and applications. Although to date metasurfaces have mainly been investigated from an electromagnetic perspective, their ultrathin nature may also provide novel and useful mechanical properties. Here we propose a thin piezoelectric plasmonic metasurface forming the resonant body of a nanomechanical resonator with simultaneously tailored optical and electromechanical properties. We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate. The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities. These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

No MeSH data available.


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Absorption properties of the proposed plasmonic piezoelectric nanomechanical resonator.(a) Simulated (transmission line theory) and measured (FTIR) absorption spectra of a 500-nm-thick AlN slab grounded by a Pt layer (without plasmonic nanostructures). It shows two intrinsic absorption peaks, associated with AlN at 11.3 μm (888 cm−1) and 15.5 μm (647 cm−1)40, and one at 4 μm associated with the resonant structure. (b) Simulated and measured absorption spectra of the fabricated plasmonic piezoelectric nanomechanical resonator. The dimensions of the Au patches that compose the metasurface are a=1,635 nm, b=310 nm, and the thickness of the Au, AlN and Pt layers are 50, 500 and 100 nm, respectively. (c,d) Measured and simulated absorption properties of the piezoelectric plasmonic resonant structure with varied Au patch sizes, demonstrating its functionality of spectrally elective detection of infrared radiation in the LWIR range. The unit cell sizes are as follows: design A: a=1,780 nm, b=128 nm; design B: a=1,680 nm, b=253 nm; design C: a=1,640 nm, b=313 nm; design D: a=1,620 nm, b=331 nm.
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f2: Absorption properties of the proposed plasmonic piezoelectric nanomechanical resonator.(a) Simulated (transmission line theory) and measured (FTIR) absorption spectra of a 500-nm-thick AlN slab grounded by a Pt layer (without plasmonic nanostructures). It shows two intrinsic absorption peaks, associated with AlN at 11.3 μm (888 cm−1) and 15.5 μm (647 cm−1)40, and one at 4 μm associated with the resonant structure. (b) Simulated and measured absorption spectra of the fabricated plasmonic piezoelectric nanomechanical resonator. The dimensions of the Au patches that compose the metasurface are a=1,635 nm, b=310 nm, and the thickness of the Au, AlN and Pt layers are 50, 500 and 100 nm, respectively. (c,d) Measured and simulated absorption properties of the piezoelectric plasmonic resonant structure with varied Au patch sizes, demonstrating its functionality of spectrally elective detection of infrared radiation in the LWIR range. The unit cell sizes are as follows: design A: a=1,780 nm, b=128 nm; design B: a=1,680 nm, b=253 nm; design C: a=1,640 nm, b=313 nm; design D: a=1,620 nm, b=331 nm.

Mentions: In our device, the plasmonic nanostructures cover 80% of the top metal layer, as a trade-off between large absorption, achieved by coating the entire layer, and high electromechanical transduction efficiency, achieved by removing a portion of the metasurface and replacing it with continuous metal (Supplementary Note 3). We achieved an electromechanical coupling coefficient, kt2∼1% (Supplementary Fig. 4). Figure 2a,b presents the predicted absorption with and without top subwavelength patches, highlighting how the metasurface can largely increase the absorption at resonance, despite the deeply subwavelength thickness of the device. We also theoretically and experimentally demonstrate that a strong and spectrally selective absorption of long-wavelength infrared (LWIR) radiation, with lithographically determined centre frequency and peak values >85% (over the device area covered by the plasmonic metasurface), can be readily achieved (Fig. 2c,d). Our measurements match very well with the theoretical simulations within the entire band of interest.


Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing.

Hui Y, Gomez-Diaz JS, Qian Z, Alù A, Rinaldi M - Nat Commun (2016)

Absorption properties of the proposed plasmonic piezoelectric nanomechanical resonator.(a) Simulated (transmission line theory) and measured (FTIR) absorption spectra of a 500-nm-thick AlN slab grounded by a Pt layer (without plasmonic nanostructures). It shows two intrinsic absorption peaks, associated with AlN at 11.3 μm (888 cm−1) and 15.5 μm (647 cm−1)40, and one at 4 μm associated with the resonant structure. (b) Simulated and measured absorption spectra of the fabricated plasmonic piezoelectric nanomechanical resonator. The dimensions of the Au patches that compose the metasurface are a=1,635 nm, b=310 nm, and the thickness of the Au, AlN and Pt layers are 50, 500 and 100 nm, respectively. (c,d) Measured and simulated absorption properties of the piezoelectric plasmonic resonant structure with varied Au patch sizes, demonstrating its functionality of spectrally elective detection of infrared radiation in the LWIR range. The unit cell sizes are as follows: design A: a=1,780 nm, b=128 nm; design B: a=1,680 nm, b=253 nm; design C: a=1,640 nm, b=313 nm; design D: a=1,620 nm, b=331 nm.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4835539&req=5

f2: Absorption properties of the proposed plasmonic piezoelectric nanomechanical resonator.(a) Simulated (transmission line theory) and measured (FTIR) absorption spectra of a 500-nm-thick AlN slab grounded by a Pt layer (without plasmonic nanostructures). It shows two intrinsic absorption peaks, associated with AlN at 11.3 μm (888 cm−1) and 15.5 μm (647 cm−1)40, and one at 4 μm associated with the resonant structure. (b) Simulated and measured absorption spectra of the fabricated plasmonic piezoelectric nanomechanical resonator. The dimensions of the Au patches that compose the metasurface are a=1,635 nm, b=310 nm, and the thickness of the Au, AlN and Pt layers are 50, 500 and 100 nm, respectively. (c,d) Measured and simulated absorption properties of the piezoelectric plasmonic resonant structure with varied Au patch sizes, demonstrating its functionality of spectrally elective detection of infrared radiation in the LWIR range. The unit cell sizes are as follows: design A: a=1,780 nm, b=128 nm; design B: a=1,680 nm, b=253 nm; design C: a=1,640 nm, b=313 nm; design D: a=1,620 nm, b=331 nm.
Mentions: In our device, the plasmonic nanostructures cover 80% of the top metal layer, as a trade-off between large absorption, achieved by coating the entire layer, and high electromechanical transduction efficiency, achieved by removing a portion of the metasurface and replacing it with continuous metal (Supplementary Note 3). We achieved an electromechanical coupling coefficient, kt2∼1% (Supplementary Fig. 4). Figure 2a,b presents the predicted absorption with and without top subwavelength patches, highlighting how the metasurface can largely increase the absorption at resonance, despite the deeply subwavelength thickness of the device. We also theoretically and experimentally demonstrate that a strong and spectrally selective absorption of long-wavelength infrared (LWIR) radiation, with lithographically determined centre frequency and peak values >85% (over the device area covered by the plasmonic metasurface), can be readily achieved (Fig. 2c,d). Our measurements match very well with the theoretical simulations within the entire band of interest.

Bottom Line: We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate.The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities.These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical &Computer Engineering at Northeastern University, 360 Huntington Avenue, Boston, Massachusetts 02115, USA.

ABSTRACT
Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading to exciting optical functionalities and applications. Although to date metasurfaces have mainly been investigated from an electromagnetic perspective, their ultrathin nature may also provide novel and useful mechanical properties. Here we propose a thin piezoelectric plasmonic metasurface forming the resonant body of a nanomechanical resonator with simultaneously tailored optical and electromechanical properties. We experimentally demonstrate that it is possible to achieve high thermomechanical coupling between electromagnetic and mechanical resonances in a single ultrathin piezoelectric nanoplate. The combination of nanoplasmonic and piezoelectric resonances allows the proposed device to selectively detect long-wavelength infrared radiation with unprecedented electromechanical performance and thermal capabilities. These attributes lead to the demonstration of a fast, high-resolution, uncooled infrared detector with ∼80% absorption for an optimized spectral bandwidth centered around 8.8 μm.

No MeSH data available.


Related in: MedlinePlus