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Template-Stripped Tunable Plasmonic Devices on Stretchable and Rollable Substrates.

Yoo D, Johnson TW, Cherukulappurath S, Norris DJ, Oh SH - ACS Nano (2015)

Bottom Line: The use of a flexible transfer layer also enables template stripping using a cylindrical roller as a substrate.As an example, we demonstrate roller template stripping of metallic nanoholes, nanodisks, wires, and pyramids onto the cylindrical surface of a glass rod lens.These nonplanar metallic structures produced via template stripping with flexible and stretchable films can facilitate many applications in sensing, display, plasmonics, metasurfaces, and roll-to-roll fabrication.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.

ABSTRACT
We use template stripping to integrate metallic nanostructures onto flexible, stretchable, and rollable substrates. Using this approach, high-quality patterned metals that are replicated from reusable silicon templates can be directly transferred to polydimethylsiloxane (PDMS) substrates. First we produce stretchable gold nanohole arrays and show that their optical transmission spectra can be modulated by mechanical stretching. Next we fabricate stretchable arrays of gold pyramids and demonstrate a modulation of the wavelength of light resonantly scattered from the tip of the pyramid by stretching the underlying PDMS film. The use of a flexible transfer layer also enables template stripping using a cylindrical roller as a substrate. As an example, we demonstrate roller template stripping of metallic nanoholes, nanodisks, wires, and pyramids onto the cylindrical surface of a glass rod lens. These nonplanar metallic structures produced via template stripping with flexible and stretchable films can facilitate many applications in sensing, display, plasmonics, metasurfaces, and roll-to-roll fabrication.

No MeSH data available.


Related in: MedlinePlus

Fabrication of isolated gold pyramids template-stripped onto PDMS. (a) An array of pyramidal pits is formed by anisotropic etching in KOH through circular openings in a Si3N4 etch mask which is subsequently removed. (b) An array of 8 μm diameter circles in photoresist is patterned on top of the etched inverted pyramid array. (c) 135 nm of Au followed by 10 nm of Ti are deposited at 10° from normal using a directional e-beam evaporator. After lift-off, an array of disconnected, inverted Au pyramids is generated. (d) After oxygen plasma exposure to break bridging oxygen bonds, PDMS is spin-coated over the Au pyramidal pit array and cured at 60 °C for 12 h. The PDMS layer is then peeled off of the Si wafer. (e) Top-view and (f) bird’s eye view SEMs of a Au pyramid array on a PDMS substrate. Scale bar: (e), (f) 20 μm. (g) Photograph of 1 in. × 1 in. flexible PDMS film fully covered with gold pyramids.
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fig2: Fabrication of isolated gold pyramids template-stripped onto PDMS. (a) An array of pyramidal pits is formed by anisotropic etching in KOH through circular openings in a Si3N4 etch mask which is subsequently removed. (b) An array of 8 μm diameter circles in photoresist is patterned on top of the etched inverted pyramid array. (c) 135 nm of Au followed by 10 nm of Ti are deposited at 10° from normal using a directional e-beam evaporator. After lift-off, an array of disconnected, inverted Au pyramids is generated. (d) After oxygen plasma exposure to break bridging oxygen bonds, PDMS is spin-coated over the Au pyramidal pit array and cured at 60 °C for 12 h. The PDMS layer is then peeled off of the Si wafer. (e) Top-view and (f) bird’s eye view SEMs of a Au pyramid array on a PDMS substrate. Scale bar: (e), (f) 20 μm. (g) Photograph of 1 in. × 1 in. flexible PDMS film fully covered with gold pyramids.

Mentions: The fabrication process for asymmetric metallic pyramid arrays on PDMS substrates is depicted in Figure 2. First, an array of circular patterns is made in a silicon nitride (Si3N4) film on a Si wafer via photolithography (Karl Suss, MA-6) and dry etching (STS, 320PC). Second, anisotropic Si etching in a Potassium hydroxide (KOH) solution23,48,49 creates inverted pyramidal pits in the exposed regions and the silicon nitride mask is removed (Figure 2a). Next, circular photoresist patterns that reveal individual openings of pyramids are made to isolate each pyramid (Figure 2b). Then a 135 nm-thick Au film and a 10 nm-thick Ti adhesion layer are deposited at an incidence angle of 10° from normal by directional electron-beam evaporation (CHA, SEC 600), resulting in asymmetric Au pyramids with different Au thicknesses (45 and 120 nm) on opposing facets. After metal lift-off, an array of isolated, inverted Au pyramids is obtained (Figure 2c). Following O2 plasma exposure to break bridging oxygen bonds on the Ti surface, PDMS (10:1 weight ratio mixture of base resin and curing agent) is spin-coated onto the Si template with the Au pyramidal pit array. After curing for 12 h at 60 °C, the PDMS layer is peeled off of the Si template (Figure 2d).


Template-Stripped Tunable Plasmonic Devices on Stretchable and Rollable Substrates.

Yoo D, Johnson TW, Cherukulappurath S, Norris DJ, Oh SH - ACS Nano (2015)

Fabrication of isolated gold pyramids template-stripped onto PDMS. (a) An array of pyramidal pits is formed by anisotropic etching in KOH through circular openings in a Si3N4 etch mask which is subsequently removed. (b) An array of 8 μm diameter circles in photoresist is patterned on top of the etched inverted pyramid array. (c) 135 nm of Au followed by 10 nm of Ti are deposited at 10° from normal using a directional e-beam evaporator. After lift-off, an array of disconnected, inverted Au pyramids is generated. (d) After oxygen plasma exposure to break bridging oxygen bonds, PDMS is spin-coated over the Au pyramidal pit array and cured at 60 °C for 12 h. The PDMS layer is then peeled off of the Si wafer. (e) Top-view and (f) bird’s eye view SEMs of a Au pyramid array on a PDMS substrate. Scale bar: (e), (f) 20 μm. (g) Photograph of 1 in. × 1 in. flexible PDMS film fully covered with gold pyramids.
© Copyright Policy
Related In: Results  -  Collection

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getmorefigures.php?uid=PMC4660390&req=5

fig2: Fabrication of isolated gold pyramids template-stripped onto PDMS. (a) An array of pyramidal pits is formed by anisotropic etching in KOH through circular openings in a Si3N4 etch mask which is subsequently removed. (b) An array of 8 μm diameter circles in photoresist is patterned on top of the etched inverted pyramid array. (c) 135 nm of Au followed by 10 nm of Ti are deposited at 10° from normal using a directional e-beam evaporator. After lift-off, an array of disconnected, inverted Au pyramids is generated. (d) After oxygen plasma exposure to break bridging oxygen bonds, PDMS is spin-coated over the Au pyramidal pit array and cured at 60 °C for 12 h. The PDMS layer is then peeled off of the Si wafer. (e) Top-view and (f) bird’s eye view SEMs of a Au pyramid array on a PDMS substrate. Scale bar: (e), (f) 20 μm. (g) Photograph of 1 in. × 1 in. flexible PDMS film fully covered with gold pyramids.
Mentions: The fabrication process for asymmetric metallic pyramid arrays on PDMS substrates is depicted in Figure 2. First, an array of circular patterns is made in a silicon nitride (Si3N4) film on a Si wafer via photolithography (Karl Suss, MA-6) and dry etching (STS, 320PC). Second, anisotropic Si etching in a Potassium hydroxide (KOH) solution23,48,49 creates inverted pyramidal pits in the exposed regions and the silicon nitride mask is removed (Figure 2a). Next, circular photoresist patterns that reveal individual openings of pyramids are made to isolate each pyramid (Figure 2b). Then a 135 nm-thick Au film and a 10 nm-thick Ti adhesion layer are deposited at an incidence angle of 10° from normal by directional electron-beam evaporation (CHA, SEC 600), resulting in asymmetric Au pyramids with different Au thicknesses (45 and 120 nm) on opposing facets. After metal lift-off, an array of isolated, inverted Au pyramids is obtained (Figure 2c). Following O2 plasma exposure to break bridging oxygen bonds on the Ti surface, PDMS (10:1 weight ratio mixture of base resin and curing agent) is spin-coated onto the Si template with the Au pyramidal pit array. After curing for 12 h at 60 °C, the PDMS layer is peeled off of the Si template (Figure 2d).

Bottom Line: The use of a flexible transfer layer also enables template stripping using a cylindrical roller as a substrate.As an example, we demonstrate roller template stripping of metallic nanoholes, nanodisks, wires, and pyramids onto the cylindrical surface of a glass rod lens.These nonplanar metallic structures produced via template stripping with flexible and stretchable films can facilitate many applications in sensing, display, plasmonics, metasurfaces, and roll-to-roll fabrication.

View Article: PubMed Central - PubMed

Affiliation: Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States.

ABSTRACT
We use template stripping to integrate metallic nanostructures onto flexible, stretchable, and rollable substrates. Using this approach, high-quality patterned metals that are replicated from reusable silicon templates can be directly transferred to polydimethylsiloxane (PDMS) substrates. First we produce stretchable gold nanohole arrays and show that their optical transmission spectra can be modulated by mechanical stretching. Next we fabricate stretchable arrays of gold pyramids and demonstrate a modulation of the wavelength of light resonantly scattered from the tip of the pyramid by stretching the underlying PDMS film. The use of a flexible transfer layer also enables template stripping using a cylindrical roller as a substrate. As an example, we demonstrate roller template stripping of metallic nanoholes, nanodisks, wires, and pyramids onto the cylindrical surface of a glass rod lens. These nonplanar metallic structures produced via template stripping with flexible and stretchable films can facilitate many applications in sensing, display, plasmonics, metasurfaces, and roll-to-roll fabrication.

No MeSH data available.


Related in: MedlinePlus