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Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40).

Stratulat A, Serban BC, de Luca A, Avramescu V, Cobianu C, Brezeanu M, Buiu O, Diamandescu L, Feder M, Ali SZ, Udrea F - Sensors (Basel) (2015)

Bottom Line: Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C.The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s).These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

View Article: PubMed Central - PubMed

Affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. alisa.stratulat@honeywell.com.

ABSTRACT
The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

No MeSH data available.


(a) O2 resistive sensor structure employing a CMOS-compatible SOI micro-hotplate as substrate and Sono-STFO40 as sensing layer; (b) Top-view of the manufactured O2 resistive sensor.
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sensors-15-17495-f001: (a) O2 resistive sensor structure employing a CMOS-compatible SOI micro-hotplate as substrate and Sono-STFO40 as sensing layer; (b) Top-view of the manufactured O2 resistive sensor.

Mentions: In order to manufacture the resistive oxygen sensor, the Sono-STFO40 slurry was deposited on a Silicon-on-Insulator (SOI) micro-hotplate membrane, similar to the one depicted in Figure 1. The circular membrane (600 µm diameter) comprises a buried oxide (BOX) layer (1 µm thick), a SiO2 layer (~4 µm thick) and a tungsten heater. The silicon substrate was back etched by Deep Reactive Ion Etching (DRIE) to thermally isolate the membrane. The micro-hotplate thus obtained is fully Complementary Metal-Oxide-Semiconductor (CMOS) compatible. Post-CMOS deposited gold interdigitated electrodes (IDEs) allow electrical contact to the semiconductor sensing layer.


Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40).

Stratulat A, Serban BC, de Luca A, Avramescu V, Cobianu C, Brezeanu M, Buiu O, Diamandescu L, Feder M, Ali SZ, Udrea F - Sensors (Basel) (2015)

(a) O2 resistive sensor structure employing a CMOS-compatible SOI micro-hotplate as substrate and Sono-STFO40 as sensing layer; (b) Top-view of the manufactured O2 resistive sensor.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541946&req=5

sensors-15-17495-f001: (a) O2 resistive sensor structure employing a CMOS-compatible SOI micro-hotplate as substrate and Sono-STFO40 as sensing layer; (b) Top-view of the manufactured O2 resistive sensor.
Mentions: In order to manufacture the resistive oxygen sensor, the Sono-STFO40 slurry was deposited on a Silicon-on-Insulator (SOI) micro-hotplate membrane, similar to the one depicted in Figure 1. The circular membrane (600 µm diameter) comprises a buried oxide (BOX) layer (1 µm thick), a SiO2 layer (~4 µm thick) and a tungsten heater. The silicon substrate was back etched by Deep Reactive Ion Etching (DRIE) to thermally isolate the membrane. The micro-hotplate thus obtained is fully Complementary Metal-Oxide-Semiconductor (CMOS) compatible. Post-CMOS deposited gold interdigitated electrodes (IDEs) allow electrical contact to the semiconductor sensing layer.

Bottom Line: Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C.The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s).These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

View Article: PubMed Central - PubMed

Affiliation: Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania. alisa.stratulat@honeywell.com.

ABSTRACT
The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

No MeSH data available.