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Self-Balancing Position-Sensitive Detector (SBPSD).

Porrazzo R, Lydecker L, Gattu S, Bakhru H, Tokranova N, Castracane J - Sensors (Basel) (2015)

Bottom Line: Fabricated prototype devices demonstrate linear, symmetric coordinate characteristics and a spatial resolution of 200 μm for a 74 mm device.PSDs are commercially available only up to a length of 37 mm.Prototype devices were fabricated with various lengths up to 100 mm and can be scaled down to any size below that.

View Article: PubMed Central - PubMed

Affiliation: Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, 257 Fuller Road, Albany, NY 12222, USA. rporrazzo@albany.edu.

ABSTRACT
Optical position-sensitive detectors (PSDs) are a non-contact method of tracking the location of a light spot. Silicon-based versions of such sensors are fabricated with standard CMOS technology, are inexpensive and provide a real-time, analog signal output corresponding to the position of the light spot. An innovative type of optical position sensor was developed using two back-to-back connected photodiodes. These so called self-balancing position-sensitive detectors (SBPSDs) eliminate the need for external readout circuitry entirely. Fabricated prototype devices demonstrate linear, symmetric coordinate characteristics and a spatial resolution of 200 μm for a 74 mm device. PSDs are commercially available only up to a length of 37 mm. Prototype devices were fabricated with various lengths up to 100 mm and can be scaled down to any size below that.

No MeSH data available.


Related in: MedlinePlus

Simulation of hosphorous ion implantation through surface oxide using SRIM software.
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sensors-15-17483-f004: Simulation of hosphorous ion implantation through surface oxide using SRIM software.

Mentions: The main doped device lines were then defined onto the SiO2 with standard contact photolithography processing, leaving only the desired doping area exposed. The parallel device lines were then doped with phosphorous through the oxide using ion implantation. The implant energy was 350 keV and the dose was 1.67 × 1016 ions/cm2, as shown in Figure 4, simulated by SRIM (Stopping Range of Ions in Matter) software. After the implant, the photoresist mask was stripped, and the wafers were annealed in argon at 1000 °C for 1 min using a rapid thermal anneal process to thermally activate dopants and fix damage in the crystal lattice.


Self-Balancing Position-Sensitive Detector (SBPSD).

Porrazzo R, Lydecker L, Gattu S, Bakhru H, Tokranova N, Castracane J - Sensors (Basel) (2015)

Simulation of hosphorous ion implantation through surface oxide using SRIM software.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541945&req=5

sensors-15-17483-f004: Simulation of hosphorous ion implantation through surface oxide using SRIM software.
Mentions: The main doped device lines were then defined onto the SiO2 with standard contact photolithography processing, leaving only the desired doping area exposed. The parallel device lines were then doped with phosphorous through the oxide using ion implantation. The implant energy was 350 keV and the dose was 1.67 × 1016 ions/cm2, as shown in Figure 4, simulated by SRIM (Stopping Range of Ions in Matter) software. After the implant, the photoresist mask was stripped, and the wafers were annealed in argon at 1000 °C for 1 min using a rapid thermal anneal process to thermally activate dopants and fix damage in the crystal lattice.

Bottom Line: Fabricated prototype devices demonstrate linear, symmetric coordinate characteristics and a spatial resolution of 200 μm for a 74 mm device.PSDs are commercially available only up to a length of 37 mm.Prototype devices were fabricated with various lengths up to 100 mm and can be scaled down to any size below that.

View Article: PubMed Central - PubMed

Affiliation: Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, 257 Fuller Road, Albany, NY 12222, USA. rporrazzo@albany.edu.

ABSTRACT
Optical position-sensitive detectors (PSDs) are a non-contact method of tracking the location of a light spot. Silicon-based versions of such sensors are fabricated with standard CMOS technology, are inexpensive and provide a real-time, analog signal output corresponding to the position of the light spot. An innovative type of optical position sensor was developed using two back-to-back connected photodiodes. These so called self-balancing position-sensitive detectors (SBPSDs) eliminate the need for external readout circuitry entirely. Fabricated prototype devices demonstrate linear, symmetric coordinate characteristics and a spatial resolution of 200 μm for a 74 mm device. PSDs are commercially available only up to a length of 37 mm. Prototype devices were fabricated with various lengths up to 100 mm and can be scaled down to any size below that.

No MeSH data available.


Related in: MedlinePlus