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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The wavelength interrogation curve for the bimetallic SPR curve with 3 nm Au over 32 nm Al.
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sensors-15-17313-f013: The wavelength interrogation curve for the bimetallic SPR curve with 3 nm Au over 32 nm Al.

Mentions: As the output signal is produced by the photodetector array and the operating wavelength is discrete, the refractive index based detection limit of this SPR sensor array is determined by the wavelength resolution (δλ) of the adjacent sensor element, which is closely related to the relative power measurement accuracy (IR) of the photodetector [29]. The wavelength resolution (δλ) of adjacent sensor element can be obtain from the SPR resonance curve of almost continuous wavelength interrogations, using the N-layer transfer matrix method with a very small calculating increment of wavelength, as shown in Figure 13. Generally, the relative power measurement accuracy can reach a valve of 0.01 dB, the wavelength resolution of adjacent sensor element of SPR sensor array with 3 nm Au over 32 nm Al can be found, δλ = 0.44 nm. With the high sensitivity of 3.968 × 104 nm/RIU, the refractive index variation of 1.14 × 10−5 RIU can be detected.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The wavelength interrogation curve for the bimetallic SPR curve with 3 nm Au over 32 nm Al.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f013: The wavelength interrogation curve for the bimetallic SPR curve with 3 nm Au over 32 nm Al.
Mentions: As the output signal is produced by the photodetector array and the operating wavelength is discrete, the refractive index based detection limit of this SPR sensor array is determined by the wavelength resolution (δλ) of the adjacent sensor element, which is closely related to the relative power measurement accuracy (IR) of the photodetector [29]. The wavelength resolution (δλ) of adjacent sensor element can be obtain from the SPR resonance curve of almost continuous wavelength interrogations, using the N-layer transfer matrix method with a very small calculating increment of wavelength, as shown in Figure 13. Generally, the relative power measurement accuracy can reach a valve of 0.01 dB, the wavelength resolution of adjacent sensor element of SPR sensor array with 3 nm Au over 32 nm Al can be found, δλ = 0.44 nm. With the high sensitivity of 3.968 × 104 nm/RIU, the refractive index variation of 1.14 × 10−5 RIU can be detected.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus