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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The electric intensity map of the bimetallic SPR sensor with 3 nm Au over 32 nm Al in the 2D-FDTD simulation at an operating wavelength of 1550 nm. The mesh grid in the regions of trench-based waveguide bends is set to 5 nm, and the mesh grid of metal layer is set to 1 nm.
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sensors-15-17313-f011: The electric intensity map of the bimetallic SPR sensor with 3 nm Au over 32 nm Al in the 2D-FDTD simulation at an operating wavelength of 1550 nm. The mesh grid in the regions of trench-based waveguide bends is set to 5 nm, and the mesh grid of metal layer is set to 1 nm.

Mentions: According to the structure configuration shown in Figure 1, and employing the resonance parameters from above analytical method, the bimetallic SPR sensor with 3 nm Au over 32 nm Al is simulated by using the 2D-FDTD with PMLs, and its optical transmission distribution is shown in Figure 11. Here, the TE-polarized fundamental mode of the SOI rib waveguide acted as the source incident into the input waveguide, and the half-angle of the V-shaped bend waveguide θ = 22.65°, which was calculated by the above analysis method with the effective model at resonance wavelength of 1550 nm.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The electric intensity map of the bimetallic SPR sensor with 3 nm Au over 32 nm Al in the 2D-FDTD simulation at an operating wavelength of 1550 nm. The mesh grid in the regions of trench-based waveguide bends is set to 5 nm, and the mesh grid of metal layer is set to 1 nm.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f011: The electric intensity map of the bimetallic SPR sensor with 3 nm Au over 32 nm Al in the 2D-FDTD simulation at an operating wavelength of 1550 nm. The mesh grid in the regions of trench-based waveguide bends is set to 5 nm, and the mesh grid of metal layer is set to 1 nm.
Mentions: According to the structure configuration shown in Figure 1, and employing the resonance parameters from above analytical method, the bimetallic SPR sensor with 3 nm Au over 32 nm Al is simulated by using the 2D-FDTD with PMLs, and its optical transmission distribution is shown in Figure 11. Here, the TE-polarized fundamental mode of the SOI rib waveguide acted as the source incident into the input waveguide, and the half-angle of the V-shaped bend waveguide θ = 22.65°, which was calculated by the above analysis method with the effective model at resonance wavelength of 1550 nm.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus