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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


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The influence of the thickness of Al layer in the bimetallic SPR sensor with 3 nm or 5 nm Au.
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sensors-15-17313-f009: The influence of the thickness of Al layer in the bimetallic SPR sensor with 3 nm or 5 nm Au.

Mentions: For the bimetallic configuration with a few nanometers Au layer deposited over Al, the thicknesses of each metal layer have influence on the performance of the SPR sensor. It can be seen from Figure 9 that the bimetallic SPR sensor exhibits highest sensitivity Sn = 4.458 × 104 nm/RIU with 20 nm Al and 5 nm Au, but smallest DA = 5.95 μm−1. In addition, the Contrast achieves a maximum in thinner Al layer (about 22 nm) and has an overall downtrend. The thinner Al layer leads to higher sensitivity and Contrast but lower DA of SPR sensor, so there is a tradeoff between the sensitivity, Contrast and DA. On the other hand, with the thickness of Au increasing, the sensitivity of SPR sensor increases linearly, but the DA and Contrast become worse, as shown in Figure 10. It is worth noting that the influence of Au layer thickness is smaller than that of Al, therefore, a few nanometer Au layer retains the sensor’s high performance along with protects Al from oxidation.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The influence of the thickness of Al layer in the bimetallic SPR sensor with 3 nm or 5 nm Au.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f009: The influence of the thickness of Al layer in the bimetallic SPR sensor with 3 nm or 5 nm Au.
Mentions: For the bimetallic configuration with a few nanometers Au layer deposited over Al, the thicknesses of each metal layer have influence on the performance of the SPR sensor. It can be seen from Figure 9 that the bimetallic SPR sensor exhibits highest sensitivity Sn = 4.458 × 104 nm/RIU with 20 nm Al and 5 nm Au, but smallest DA = 5.95 μm−1. In addition, the Contrast achieves a maximum in thinner Al layer (about 22 nm) and has an overall downtrend. The thinner Al layer leads to higher sensitivity and Contrast but lower DA of SPR sensor, so there is a tradeoff between the sensitivity, Contrast and DA. On the other hand, with the thickness of Au increasing, the sensitivity of SPR sensor increases linearly, but the DA and Contrast become worse, as shown in Figure 10. It is worth noting that the influence of Au layer thickness is smaller than that of Al, therefore, a few nanometer Au layer retains the sensor’s high performance along with protects Al from oxidation.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus