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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The comparison diagram of wavelength interrogation curve for single metallic SPR with 40 nm Al and bimetallic SPR curve with 3 nm Au over 37 nm Al.
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sensors-15-17313-f008: The comparison diagram of wavelength interrogation curve for single metallic SPR with 40 nm Al and bimetallic SPR curve with 3 nm Au over 37 nm Al.

Mentions: Al is easily oxidized because its poor chemical stability and its oxidation will influence the performance of Al SPR sensors [12,13]. Making use of the bimetallic configuration (coating an ultra-thin layer of Au over Al) is a good solution to avoid this problem [11,12,14]. Supposing 3 nm Au deposited over 37 nm Al, the bimetallic SPR curve is shown in Figure 8. In this case, the sensitivity and FWHM of bimetallic SPR sensor is larger slightly than that of single metallic SPR sensor with the same thickness of metal layer, but the Contrast is almost unchanged. It is concluded that the bimetallic SPR sensor with 3 nm Au over 37 nm Al inherits the advantages of the single metallic SPR sensor with 40 nm Al, and the several nanometers Au can protect Al from oxidization.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The comparison diagram of wavelength interrogation curve for single metallic SPR with 40 nm Al and bimetallic SPR curve with 3 nm Au over 37 nm Al.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f008: The comparison diagram of wavelength interrogation curve for single metallic SPR with 40 nm Al and bimetallic SPR curve with 3 nm Au over 37 nm Al.
Mentions: Al is easily oxidized because its poor chemical stability and its oxidation will influence the performance of Al SPR sensors [12,13]. Making use of the bimetallic configuration (coating an ultra-thin layer of Au over Al) is a good solution to avoid this problem [11,12,14]. Supposing 3 nm Au deposited over 37 nm Al, the bimetallic SPR curve is shown in Figure 8. In this case, the sensitivity and FWHM of bimetallic SPR sensor is larger slightly than that of single metallic SPR sensor with the same thickness of metal layer, but the Contrast is almost unchanged. It is concluded that the bimetallic SPR sensor with 3 nm Au over 37 nm Al inherits the advantages of the single metallic SPR sensor with 40 nm Al, and the several nanometers Au can protect Al from oxidization.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus