Limits...
Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The single metallic SPR curve of wavelength interrogation for different SPR active metal (Au or Al) and different refractive index of the analyte solution.
© Copyright Policy
Related In: Results  -  Collection

License
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f007: The single metallic SPR curve of wavelength interrogation for different SPR active metal (Au or Al) and different refractive index of the analyte solution.

Mentions: For 40 nm Al and 50 nm Au SPR sensors, the shifts in resonance wavelength (ΔλRes) for a given change Δna = 0.001 of the refractive index of the analyte solution are shown in Figure 7. Al SPR exhibits smaller shift as compared to Au, so the sensitivity of Al SPR sensor is lower than that of Au SPR sensor. There, the sensitivity of 40 nm Al and 50 nm Au SPR sensor are 3.7 × 104 nm/RIU and 6.21 × 104 nm/RIU, respectively. Despite all this, the overall performance of the single metallic SPR sensor based on Al is better than Au, especially for this SOI rib waveguide platform with operation wavelength within the specified spectral range from 1200 nm to 1800 nm.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The single metallic SPR curve of wavelength interrogation for different SPR active metal (Au or Al) and different refractive index of the analyte solution.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f007: The single metallic SPR curve of wavelength interrogation for different SPR active metal (Au or Al) and different refractive index of the analyte solution.
Mentions: For 40 nm Al and 50 nm Au SPR sensors, the shifts in resonance wavelength (ΔλRes) for a given change Δna = 0.001 of the refractive index of the analyte solution are shown in Figure 7. Al SPR exhibits smaller shift as compared to Au, so the sensitivity of Al SPR sensor is lower than that of Au SPR sensor. There, the sensitivity of 40 nm Al and 50 nm Au SPR sensor are 3.7 × 104 nm/RIU and 6.21 × 104 nm/RIU, respectively. Despite all this, the overall performance of the single metallic SPR sensor based on Al is better than Au, especially for this SOI rib waveguide platform with operation wavelength within the specified spectral range from 1200 nm to 1800 nm.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus