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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The single metallic SPR curve of angular interrogation for different thickness of the metal (Au or Al) layer at operating wavelength of 1550 nm and the refractive index of the analyte solution na = 1.33.
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sensors-15-17313-f005: The single metallic SPR curve of angular interrogation for different thickness of the metal (Au or Al) layer at operating wavelength of 1550 nm and the refractive index of the analyte solution na = 1.33.

Mentions: The single metallic SPR sensors used Au or Al are analyzed and compared, Figure 5 and Figure 6 are the SPR curve of angular interrogation and wavelength interrogation, respectively. To ensure the resonance wavelengths within the specified spectral range (1200~1800 nm) with a central wavelength of 1550 nm, the SPR curves of wavelength interrogation employ the resonance angles from Figure 5 as the light incident angle θ. It is found that the changes of the metal-layer thickness lead to the variation of the resonance positions, and the reason is that the propagation constant of multilayer SPR with a thin metal layer is different to that of ideal semi-infinite configuration as the KSPR expressed in Equation (1). Due to a larger absorption coefficient, Au SPR exhibits broader resonance curve, which leads to a larger FWHM (lower DA) and even out of the specified spectral range. For the same reason, the Contrast of Al SPR curve is lower than that of Au SPR with the same thickness of the metal-layer. Furthermore, the Al SPR sensors with thinner metal layer exhibit higher Contrast and larger FWHM (lower DA), so a tradeoff of the Al-layer thickness is necessary for high performance of Al SPR sensors. For example, the detection-accuracy of 30 nm and 40 nm Al SPR sensor are 16.2 μm−1 and 26.5 μm−1, respectively.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The single metallic SPR curve of angular interrogation for different thickness of the metal (Au or Al) layer at operating wavelength of 1550 nm and the refractive index of the analyte solution na = 1.33.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f005: The single metallic SPR curve of angular interrogation for different thickness of the metal (Au or Al) layer at operating wavelength of 1550 nm and the refractive index of the analyte solution na = 1.33.
Mentions: The single metallic SPR sensors used Au or Al are analyzed and compared, Figure 5 and Figure 6 are the SPR curve of angular interrogation and wavelength interrogation, respectively. To ensure the resonance wavelengths within the specified spectral range (1200~1800 nm) with a central wavelength of 1550 nm, the SPR curves of wavelength interrogation employ the resonance angles from Figure 5 as the light incident angle θ. It is found that the changes of the metal-layer thickness lead to the variation of the resonance positions, and the reason is that the propagation constant of multilayer SPR with a thin metal layer is different to that of ideal semi-infinite configuration as the KSPR expressed in Equation (1). Due to a larger absorption coefficient, Au SPR exhibits broader resonance curve, which leads to a larger FWHM (lower DA) and even out of the specified spectral range. For the same reason, the Contrast of Al SPR curve is lower than that of Au SPR with the same thickness of the metal-layer. Furthermore, the Al SPR sensors with thinner metal layer exhibit higher Contrast and larger FWHM (lower DA), so a tradeoff of the Al-layer thickness is necessary for high performance of Al SPR sensors. For example, the detection-accuracy of 30 nm and 40 nm Al SPR sensor are 16.2 μm−1 and 26.5 μm−1, respectively.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus