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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The simplified SPR excitation model of the SPR sensor.
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sensors-15-17313-f003: The simplified SPR excitation model of the SPR sensor.

Mentions: According to Figure 1, the two dimensional (2D) SPR sensor can be numerically modeled and simulated by using 2D finite-difference time-domain (FDTD) method [21] with PMLs. Based on the effective index method (EIM) [22], the SOI rib waveguide structure was approximated as a 2D structure for these calculations. It is well known that the higher accuracy of FDTD simulation, the more time consumption and memory requirements of computers. With approximately 5 h needed for per simulation on an Intel core i7 processor with the CPU Clock Speed of 3.3 GHz, it is impossible to employing the 2D-FDTD to simulate the SPR sensor and analysis its performance, which is based on a large amount of data. Essentially, the SPR excitation mechanism of this proposed SPR sensor based on SOI rib waveguide is analogous to the classical SPR model by using a prism in the Kretschmann geometry [23], but the resonance condition must be improved and can be expressed as Equation (1).(3)k0neffsinθ=KSPR=k0εmεdεm+εdwhere, KSPR is the SPR propagation constant at the metal–analyte interface, neff is the effective refractive index of the guiding mode of the SOI rib waveguide; εm and εd are the dielectric constants of the metal and the analyte solution, respectively. k0 = 2π/λ0, and λ0 is the free space optical wavelength. Therefore, this SPR sensor can be simplified as a special Kretschmann model, including a virtual prism whose refractive index is equal to the effective refractive index of the guiding mode and a p-polarized incident beam evolved from the TE-polarized guiding mode of the SOI rib waveguide, as shown in Figure 3. So the SPR curve and the resonance parameters of this SPR sensor can be calculated rapidly using N-layer transfer matrix method [24].


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The simplified SPR excitation model of the SPR sensor.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f003: The simplified SPR excitation model of the SPR sensor.
Mentions: According to Figure 1, the two dimensional (2D) SPR sensor can be numerically modeled and simulated by using 2D finite-difference time-domain (FDTD) method [21] with PMLs. Based on the effective index method (EIM) [22], the SOI rib waveguide structure was approximated as a 2D structure for these calculations. It is well known that the higher accuracy of FDTD simulation, the more time consumption and memory requirements of computers. With approximately 5 h needed for per simulation on an Intel core i7 processor with the CPU Clock Speed of 3.3 GHz, it is impossible to employing the 2D-FDTD to simulate the SPR sensor and analysis its performance, which is based on a large amount of data. Essentially, the SPR excitation mechanism of this proposed SPR sensor based on SOI rib waveguide is analogous to the classical SPR model by using a prism in the Kretschmann geometry [23], but the resonance condition must be improved and can be expressed as Equation (1).(3)k0neffsinθ=KSPR=k0εmεdεm+εdwhere, KSPR is the SPR propagation constant at the metal–analyte interface, neff is the effective refractive index of the guiding mode of the SOI rib waveguide; εm and εd are the dielectric constants of the metal and the analyte solution, respectively. k0 = 2π/λ0, and λ0 is the free space optical wavelength. Therefore, this SPR sensor can be simplified as a special Kretschmann model, including a virtual prism whose refractive index is equal to the effective refractive index of the guiding mode and a p-polarized incident beam evolved from the TE-polarized guiding mode of the SOI rib waveguide, as shown in Figure 3. So the SPR curve and the resonance parameters of this SPR sensor can be calculated rapidly using N-layer transfer matrix method [24].

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus