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Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus

The top view of the waveguide based surface plasmon resonance (SPR) sensor and the schematic cross-section of the silicon-on-insulator (SOI) rib waveguide embedded in the lower left corner.
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sensors-15-17313-f001: The top view of the waveguide based surface plasmon resonance (SPR) sensor and the schematic cross-section of the silicon-on-insulator (SOI) rib waveguide embedded in the lower left corner.

Mentions: The proposed SPR sensor based on SOI rib waveguide with large cross-section is shown in Figure 1. It is comprised of an input waveguide, an output waveguide, a V-shaped bend waveguide, two air trenches and a deeply etched facet coating with metal layer as the SPR interface. In this work, the analyte solution is supposed to be water and the refractive index is in the vicinity of 1.33. The two deeply etched air trenches are used to connect the V-shaped waveguide with the input waveguide and the output waveguide, therefore two bends of the related rib waveguides are formed. Thus the input and output waveguides are in a straight line and parallel to the SPR interface. The distance between the SPR interface and the centerline of the input and output waveguides is d, the half-angle of the V-shaped bend waveguide is θ, and W and L represent the width and length of the two air trenches, respectively.


Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array.

Yuan D, Dong Y, Liu Y, Li T - Sensors (Basel) (2015)

The top view of the waveguide based surface plasmon resonance (SPR) sensor and the schematic cross-section of the silicon-on-insulator (SOI) rib waveguide embedded in the lower left corner.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541936&req=5

sensors-15-17313-f001: The top view of the waveguide based surface plasmon resonance (SPR) sensor and the schematic cross-section of the silicon-on-insulator (SOI) rib waveguide embedded in the lower left corner.
Mentions: The proposed SPR sensor based on SOI rib waveguide with large cross-section is shown in Figure 1. It is comprised of an input waveguide, an output waveguide, a V-shaped bend waveguide, two air trenches and a deeply etched facet coating with metal layer as the SPR interface. In this work, the analyte solution is supposed to be water and the refractive index is in the vicinity of 1.33. The two deeply etched air trenches are used to connect the V-shaped waveguide with the input waveguide and the output waveguide, therefore two bends of the related rib waveguides are formed. Thus the input and output waveguides are in a straight line and parallel to the SPR interface. The distance between the SPR interface and the centerline of the input and output waveguides is d, the half-angle of the V-shaped bend waveguide is θ, and W and L represent the width and length of the two air trenches, respectively.

Bottom Line: As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1).For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU.With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

View Article: PubMed Central - PubMed

Affiliation: Graduate School at Shenzhen, Tsinghua University, J209A, Tsinghua Campus, University Town of Shenzhen, Shenzhen 518055, China. ydp12@mails.tsinghua.edu.cn.

ABSTRACT
Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the SPR sensors can be composed to implement wavelength interrogation of the sensors' output signal, so the spectrometer or other bulky and expensive equipment are not necessary, which enables the SPR sensor to realize the miniaturization and integration of the entire sensing system. The performances of the SPR sensor element are verified by using the two-dimensional finite-different time-domain method. The parameters of the sensor element and the array are optimized for the achievement of high performance for biochemical sensing application. As a typical example, a single bimetallic SPR sensor with 3 nm Au over 32 nm Al possesses a high sensitivity of 3.968 × 104 nm/RIU, a detection-accuracy of 14.7 μm(-1). For a uniparted SPR sensor, it can achieve a detection limit of 5.04 × 10(-7) RIU. With the relative power measurement accuracy of 0.01 dB, the refractive index variation of 1.14 × 10(-5) RIU can be detected by the SPR sensor array.

No MeSH data available.


Related in: MedlinePlus