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Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.


Sensitivity simulation results.
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sensors-15-16929-f012: Sensitivity simulation results.

Mentions: The scale factor of the gyroscope can be simulated by harmonic response analysis in ANSYS. With the input angular rates varied from −500 to 500 °/s, the displacements of the sense frames can be calculated from simulation. Converting the obtained displacements into capacitive values, the scale factor of the sense modes can be depicted in Figure 12.


Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Sensitivity simulation results.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541915&req=5

sensors-15-16929-f012: Sensitivity simulation results.
Mentions: The scale factor of the gyroscope can be simulated by harmonic response analysis in ANSYS. With the input angular rates varied from −500 to 500 °/s, the displacements of the sense frames can be calculated from simulation. Converting the obtained displacements into capacitive values, the scale factor of the sense modes can be depicted in Figure 12.

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.