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Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.


Schematic diagrams for drive mode, yaw mode and pitch/roll mode.
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sensors-15-16929-f002: Schematic diagrams for drive mode, yaw mode and pitch/roll mode.

Mentions: (4) The roll mode: the rotation velocity in the roll mode is differentially detected by the two big frame structures in x-axis. Its working principle is same with the pitch mode. In this design, the fully decoupled mechanism depends on the elaborately arranged springs. As a result, the drive beam, yaw beam and inner frame in pitch/roll mode have only 1-DOF in their own drive or sense direction, respectively. The key point in the structure design lies in the decoupling of the in-plane movement in drive direction and the out-of-plane movement in pitch/roll mode. Thus the out-of-plane-decoupling spring-11 and -12 with thinner thickness than the other structures are adopted. They have relatively small stiffness in the z-axis direction and very big stiffness in the lateral axis direction, and thus can be used in the pitch/roll mode to achieve drive-to-sense decoupling. The schematic diagrams for different modes of motion are shown in Figure 2.


Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Schematic diagrams for drive mode, yaw mode and pitch/roll mode.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541915&req=5

sensors-15-16929-f002: Schematic diagrams for drive mode, yaw mode and pitch/roll mode.
Mentions: (4) The roll mode: the rotation velocity in the roll mode is differentially detected by the two big frame structures in x-axis. Its working principle is same with the pitch mode. In this design, the fully decoupled mechanism depends on the elaborately arranged springs. As a result, the drive beam, yaw beam and inner frame in pitch/roll mode have only 1-DOF in their own drive or sense direction, respectively. The key point in the structure design lies in the decoupling of the in-plane movement in drive direction and the out-of-plane movement in pitch/roll mode. Thus the out-of-plane-decoupling spring-11 and -12 with thinner thickness than the other structures are adopted. They have relatively small stiffness in the z-axis direction and very big stiffness in the lateral axis direction, and thus can be used in the pitch/roll mode to achieve drive-to-sense decoupling. The schematic diagrams for different modes of motion are shown in Figure 2.

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.