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Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.


Schematic of the proposed vibratory tri-axis gyroscope. (1) Drive mode springs: U-shaped spring-1, spring-2, spring-4, double-U-shaped spring-3, crab-leg spring-5; D1: driving electrodes; D2: drive-sense electrode; D3: drive beam. (2) Yaw mode springs: U-shaped spring-6, spring-8, spring-9, spring-10 and double folded spring-7; Y1: yaw-sense electrodes; Y2: feedback electrode in yaw mode; Y3: frequency tuning electrodes in yaw mode; Y4: quadrature error correction electrodes in yaw mode; (3) Pitch/roll mode springs: out-of-plane decoupling spring-11 and spring-12; P1: outer frame in roll mode; P2: inner frame in pitch mode; P3: pitch-sense electrodes; P4: feedback electrode in pitch mode; P5: quadrature error correction electrodes in pitch mode.
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sensors-15-16929-f001: Schematic of the proposed vibratory tri-axis gyroscope. (1) Drive mode springs: U-shaped spring-1, spring-2, spring-4, double-U-shaped spring-3, crab-leg spring-5; D1: driving electrodes; D2: drive-sense electrode; D3: drive beam. (2) Yaw mode springs: U-shaped spring-6, spring-8, spring-9, spring-10 and double folded spring-7; Y1: yaw-sense electrodes; Y2: feedback electrode in yaw mode; Y3: frequency tuning electrodes in yaw mode; Y4: quadrature error correction electrodes in yaw mode; (3) Pitch/roll mode springs: out-of-plane decoupling spring-11 and spring-12; P1: outer frame in roll mode; P2: inner frame in pitch mode; P3: pitch-sense electrodes; P4: feedback electrode in pitch mode; P5: quadrature error correction electrodes in pitch mode.

Mentions: The schematic of the proposed tri-axis gyroscope structure is shown in Figure 1 and summarized in Table 1. It is a highly symmetric structure consisting of four identical big frames distributed on the four sides of the structure. Different kinds of springs are adopted in the structure to achieve the goal of full decoupling. The working principle of the gyroscope can be described as follows:


Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes.

Xia D, Kong L, Gao H - Sensors (Basel) (2015)

Schematic of the proposed vibratory tri-axis gyroscope. (1) Drive mode springs: U-shaped spring-1, spring-2, spring-4, double-U-shaped spring-3, crab-leg spring-5; D1: driving electrodes; D2: drive-sense electrode; D3: drive beam. (2) Yaw mode springs: U-shaped spring-6, spring-8, spring-9, spring-10 and double folded spring-7; Y1: yaw-sense electrodes; Y2: feedback electrode in yaw mode; Y3: frequency tuning electrodes in yaw mode; Y4: quadrature error correction electrodes in yaw mode; (3) Pitch/roll mode springs: out-of-plane decoupling spring-11 and spring-12; P1: outer frame in roll mode; P2: inner frame in pitch mode; P3: pitch-sense electrodes; P4: feedback electrode in pitch mode; P5: quadrature error correction electrodes in pitch mode.
© Copyright Policy
Related In: Results  -  Collection

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getmorefigures.php?uid=PMC4541915&req=5

sensors-15-16929-f001: Schematic of the proposed vibratory tri-axis gyroscope. (1) Drive mode springs: U-shaped spring-1, spring-2, spring-4, double-U-shaped spring-3, crab-leg spring-5; D1: driving electrodes; D2: drive-sense electrode; D3: drive beam. (2) Yaw mode springs: U-shaped spring-6, spring-8, spring-9, spring-10 and double folded spring-7; Y1: yaw-sense electrodes; Y2: feedback electrode in yaw mode; Y3: frequency tuning electrodes in yaw mode; Y4: quadrature error correction electrodes in yaw mode; (3) Pitch/roll mode springs: out-of-plane decoupling spring-11 and spring-12; P1: outer frame in roll mode; P2: inner frame in pitch mode; P3: pitch-sense electrodes; P4: feedback electrode in pitch mode; P5: quadrature error correction electrodes in pitch mode.
Mentions: The schematic of the proposed tri-axis gyroscope structure is shown in Figure 1 and summarized in Table 1. It is a highly symmetric structure consisting of four identical big frames distributed on the four sides of the structure. Different kinds of springs are adopted in the structure to achieve the goal of full decoupling. The working principle of the gyroscope can be described as follows:

Bottom Line: With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively.The cross-axis effect and scale factor of each mode are also simulated.All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Micro Inertial Instruments and Advanced Navigation Technology of the Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. xiadz_1999@163.com.

ABSTRACT
We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular velocities at the same time. By elaborately arranging different beams, anchors and sensing frames, the drive and sense modes are fully decoupled from each other. Moreover, the quadrature error correction and frequency tuning functions are taken into consideration in the structure design for all the sense modes. Since there exists an unwanted in-plane rotational mode, theoretical analysis is implemented to eliminate it. To accelerate the mode matching process, the particle swam optimization (PSO) algorithm is adopted and a frequency split of 149 Hz is first achieved by this method. Then, after two steps of manual adjustment of the springs' dimensions, the frequency gap is further decreased to 3 Hz. With the help of the finite element method (FEM) software ANSYS, the natural frequencies of drive, yaw, and pitch/roll modes are found to be 14,017 Hz, 14,018 Hz and 14,020 Hz, respectively. The cross-axis effect and scale factor of each mode are also simulated. All the simulation results are in good accordance with the theoretical analysis, which means the design is effective and worthy of further investigation on the integration of tri-axis accelerometers on the same single chip to form an inertial measurement unit.

No MeSH data available.