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A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments.

Qin L, Shen D, Wei T, Tan Q, Luo T, Zhou Z, Xiong J - Sensors (Basel) (2015)

Bottom Line: Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement.Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C.Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.

ABSTRACT
In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

No MeSH data available.


Temperature compensation structure for complex environments.
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sensors-15-16729-f009: Temperature compensation structure for complex environments.

Mentions: Figure 9 shows the proposed temperature compensation structure. The left LC loop is for pressure measurement, which is the same as the structure shown in Figure 1. Meanwhile, another LC loop, next to the left LC loop, is introduced for temperature measurement. The temperature capacitor structure is the same as that of the left sensor, which contains a layer of ceramic and a layer of air cavity; the two inductor shapes are different, to keep the two measured frequencies apart. The right via has no sealant, and the permittivity of LTCC is known to increase monotonously at elevated temperatures; thus, the right LC loop can be used for measuring temperature.


A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments.

Qin L, Shen D, Wei T, Tan Q, Luo T, Zhou Z, Xiong J - Sensors (Basel) (2015)

Temperature compensation structure for complex environments.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541903&req=5

sensors-15-16729-f009: Temperature compensation structure for complex environments.
Mentions: Figure 9 shows the proposed temperature compensation structure. The left LC loop is for pressure measurement, which is the same as the structure shown in Figure 1. Meanwhile, another LC loop, next to the left LC loop, is introduced for temperature measurement. The temperature capacitor structure is the same as that of the left sensor, which contains a layer of ceramic and a layer of air cavity; the two inductor shapes are different, to keep the two measured frequencies apart. The right via has no sealant, and the permittivity of LTCC is known to increase monotonously at elevated temperatures; thus, the right LC loop can be used for measuring temperature.

Bottom Line: Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement.Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C.Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.

ABSTRACT
In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

No MeSH data available.