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A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments.

Qin L, Shen D, Wei T, Tan Q, Luo T, Zhou Z, Xiong J - Sensors (Basel) (2015)

Bottom Line: Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement.Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C.Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.

ABSTRACT
In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

No MeSH data available.


(a) Schematic and (b) physical diagrams of the high temperature/pressure complex measurement system.
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sensors-15-16729-f004: (a) Schematic and (b) physical diagrams of the high temperature/pressure complex measurement system.

Mentions: In order to measure the fabricated sensor, a complex system for simultaneously high temperature and pressure measurement is developed. Figure 4 illustrates the schematic and the physical diagrams of the measurement system. The sensor is heated from room temperature to 400 °C at a 50 °C step; when the temperature is kept constant, the furnace absolute pressure is raised by nitrogen gas from 1.7 to 3 bar.


A Wireless Passive LC Resonant Sensor Based on LTCC under High-Temperature/Pressure Environments.

Qin L, Shen D, Wei T, Tan Q, Luo T, Zhou Z, Xiong J - Sensors (Basel) (2015)

(a) Schematic and (b) physical diagrams of the high temperature/pressure complex measurement system.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541903&req=5

sensors-15-16729-f004: (a) Schematic and (b) physical diagrams of the high temperature/pressure complex measurement system.
Mentions: In order to measure the fabricated sensor, a complex system for simultaneously high temperature and pressure measurement is developed. Figure 4 illustrates the schematic and the physical diagrams of the measurement system. The sensor is heated from room temperature to 400 °C at a 50 °C step; when the temperature is kept constant, the furnace absolute pressure is raised by nitrogen gas from 1.7 to 3 bar.

Bottom Line: Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement.Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C.Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. qinli@nuc.edu.cn.

ABSTRACT
In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young's modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young's modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.

No MeSH data available.