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A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.


Relationship between the calculated voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
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sensors-15-16248-f009: Relationship between the calculated voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.

Mentions: Figure 9 shows the relationship between the voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor when sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm were used to fabricate a meliorated multi-frequency band pyroelectric sensor. Furthermore, the temperature variation rates at points PZ5, AZ15, AZ25 and AZ35 were used to estimate the voltage responsivities generated by the sputtered and aerosol ZnO films, respectively. The curve of the voltage responsivity generated by sputtered ZnO film (VP) with a rapid response could be attributed to a thinner ZnO layer with a large temperature variation rate and a small thermal capacity, while that generated by aerosol ZnO films (VA1, VA2 and VA3) with a tardy response could be attributed to a thicker ZnO layer with a large thermal capacity and a small temperature variation rate. Hence, the VP was suitable for shouldering a high-frequency response, and VA1, VA2 and VA3 were suitable for shouldering a low-frequency response. VA1, VA2 and VA3 were larger than VP at the low-frequency band, which could be attributed to a thicker ZnO layer with a small CE. The peak time of the maximum temperature variation rate increased when the thickness of the aerosol ZnO film increased due to the small temperature variation rate and large thermal capacity. VT was the integrated voltage responsivity found by combining VP with VA1, VA2 and VA3, which presented a compensatory effect to redeem the drawbacks of VA1, VA2 and VA3 with a tardy response at a high-frequency band and VP with low voltage responsivity at a low-frequency band.


A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Relationship between the calculated voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541877&req=5

sensors-15-16248-f009: Relationship between the calculated voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
Mentions: Figure 9 shows the relationship between the voltage responsivities and time in a meliorated multi-frequency band pyroelectric sensor when sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm were used to fabricate a meliorated multi-frequency band pyroelectric sensor. Furthermore, the temperature variation rates at points PZ5, AZ15, AZ25 and AZ35 were used to estimate the voltage responsivities generated by the sputtered and aerosol ZnO films, respectively. The curve of the voltage responsivity generated by sputtered ZnO film (VP) with a rapid response could be attributed to a thinner ZnO layer with a large temperature variation rate and a small thermal capacity, while that generated by aerosol ZnO films (VA1, VA2 and VA3) with a tardy response could be attributed to a thicker ZnO layer with a large thermal capacity and a small temperature variation rate. Hence, the VP was suitable for shouldering a high-frequency response, and VA1, VA2 and VA3 were suitable for shouldering a low-frequency response. VA1, VA2 and VA3 were larger than VP at the low-frequency band, which could be attributed to a thicker ZnO layer with a small CE. The peak time of the maximum temperature variation rate increased when the thickness of the aerosol ZnO film increased due to the small temperature variation rate and large thermal capacity. VT was the integrated voltage responsivity found by combining VP with VA1, VA2 and VA3, which presented a compensatory effect to redeem the drawbacks of VA1, VA2 and VA3 with a tardy response at a high-frequency band and VP with low voltage responsivity at a low-frequency band.

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.