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A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.


Relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35 in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
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sensors-15-16248-f008: Relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35 in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.

Mentions: For the meliorated multi-frequency band pyroelectric sensor, Figure 8 shows the relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35, when the sputtered ZnO film, with a constant thickness of 0.3 μm, and the aerosol ZnO films, with three thicknesses from 0.6 to 3 μm, were used to fabricate the ZnO pyroelectric sensors. The relative conditions for computing the voltage responsivity are shown in Table 5. A thinner ZnO film possessed a higher temperature variation rate and a shorter response time, while a thicker ZnO film possessed a lower temperature variation rate and a longer response time. Increasing the thickness of the ZnO layer reduced the temperature variation rate and increased the peak time of the maximum temperature variation rate. Therefore, a single ZnO film with a constant thickness in a pyroelectric device could not handle various multi-frequency sensing tasks.


A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35 in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541877&req=5

sensors-15-16248-f008: Relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35 in a meliorated multi-frequency band pyroelectric sensor under sputtered ZnO film with a constant thickness of 0.3 μm and aerosol ZnO films with three thicknesses from 0.6 to 3 μm.
Mentions: For the meliorated multi-frequency band pyroelectric sensor, Figure 8 shows the relationship between the temperature variation rate and time at points PZ5, AZ15, AZ25 and AZ35, when the sputtered ZnO film, with a constant thickness of 0.3 μm, and the aerosol ZnO films, with three thicknesses from 0.6 to 3 μm, were used to fabricate the ZnO pyroelectric sensors. The relative conditions for computing the voltage responsivity are shown in Table 5. A thinner ZnO film possessed a higher temperature variation rate and a shorter response time, while a thicker ZnO film possessed a lower temperature variation rate and a longer response time. Increasing the thickness of the ZnO layer reduced the temperature variation rate and increased the peak time of the maximum temperature variation rate. Therefore, a single ZnO film with a constant thickness in a pyroelectric device could not handle various multi-frequency sensing tasks.

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.