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A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.


Points defined for explaining the transient temperature fields in the meliorated multi-frequency band pyroelectric sensor.
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sensors-15-16248-f007: Points defined for explaining the transient temperature fields in the meliorated multi-frequency band pyroelectric sensor.

Mentions: Our study clearly shows that a large and rapid temperature variation is a favorable condition for generating high electrical signals. Transient temperature fields in multilayer ZnO thin film pyroelectric sensors were simulated, and the response time of the sensors was estimated. Furthermore, the reduction of the pyroelectric element’s thickness leads to a reduced heat capacity and a raised temperature variation of the element. However, this increases the electrical capacity of the element and decreases the voltage responsivity of pyroelectric sensors. Therefore, the data regarding temperature variation rates and response times were further used to calculate the voltage responsivity of pyroelectric sensors. The points, as shown in Figure 7, were used to interpret the temperature variation rates in a meliorated multi-frequency band pyroelectric sensor. Points PZ1, PZ3 and PZ5 were, respectively, located on the top, the middle and the bottom of the sputtered ZnO layer. The thickness of the sputtered ZnO layer was named TPZ. Points AZ11, AZ13 and AZ15 were, respectively, located on the top, the middle and the bottom of the first aerosol ZnO layer. The thickness of the first aerosol ZnO layer was named TAZ1. Similarly, points AZ21, AZ23 and AZ25 were, respectively, located on the top, the middle, and the bottom of the second aerosol ZnO layer. The thickness of the secondaerosol ZnO layer was named TAZ2. Points AZ31, AZ33 and AZ35 were, respectively, located on the top, the middle, and the bottom of the third aerosol ZnO layer. The thickness of the third aerosol ZnO layer was named TAZ3.


A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Points defined for explaining the transient temperature fields in the meliorated multi-frequency band pyroelectric sensor.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541877&req=5

sensors-15-16248-f007: Points defined for explaining the transient temperature fields in the meliorated multi-frequency band pyroelectric sensor.
Mentions: Our study clearly shows that a large and rapid temperature variation is a favorable condition for generating high electrical signals. Transient temperature fields in multilayer ZnO thin film pyroelectric sensors were simulated, and the response time of the sensors was estimated. Furthermore, the reduction of the pyroelectric element’s thickness leads to a reduced heat capacity and a raised temperature variation of the element. However, this increases the electrical capacity of the element and decreases the voltage responsivity of pyroelectric sensors. Therefore, the data regarding temperature variation rates and response times were further used to calculate the voltage responsivity of pyroelectric sensors. The points, as shown in Figure 7, were used to interpret the temperature variation rates in a meliorated multi-frequency band pyroelectric sensor. Points PZ1, PZ3 and PZ5 were, respectively, located on the top, the middle and the bottom of the sputtered ZnO layer. The thickness of the sputtered ZnO layer was named TPZ. Points AZ11, AZ13 and AZ15 were, respectively, located on the top, the middle and the bottom of the first aerosol ZnO layer. The thickness of the first aerosol ZnO layer was named TAZ1. Similarly, points AZ21, AZ23 and AZ25 were, respectively, located on the top, the middle, and the bottom of the second aerosol ZnO layer. The thickness of the secondaerosol ZnO layer was named TAZ2. Points AZ31, AZ33 and AZ35 were, respectively, located on the top, the middle, and the bottom of the third aerosol ZnO layer. The thickness of the third aerosol ZnO layer was named TAZ3.

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.