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A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.


Schematic diagram for electrical signal treatment procedure.
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sensors-15-16248-f005: Schematic diagram for electrical signal treatment procedure.

Mentions: The meliorated multi-frequency band pyroelectric sensor redeemed the drawbacks of the thinner and thicker ZnO pyroelectric films to integrate the electrical outputs generated from those films into an all-round signal. A schematic diagram of the signal treatment is shown in Figure 5. The voltage responsivity of VP was generated from the sputtered ZnO film for shouldering a high-frequency response, and the voltage responsivities of VA1, VA2 and VA3 were generated from the aerosol ZnO films for taking a low-frequency response. The integrated and treated electrical signal was VT. A responsivity measurement system, as seen in Figure 6, was used to evaluate the performance of the meliorated multi-frequency band ZnO thin-film pyroelectric sensor. This system consisted of an infrared laser, a programmable function generator, a prism, a photodiode, a beam expander, a beam equalizer, a low-noise voltage amplifier and NI LabVIEW system. The radiation source was a calibrated infrared (IR) laser with 900 nm wavelength and 7 mW maximum power. The IR laser beam was molded as a square wave with a modulated frequency (ω) by a programmable function generator. A prism was used to split the modulated beam into two beams, which had the same power: one was reflected on a photodiode as the reference signal, and the other was expanded and equalized via a beam expander and a beam equalizer such that the beam spot could uniformly cover the entire region of the top electrode of the sensors. The responsivities of VP, VA1, VA2 and VA3 were filtered, amplified, modulated, and combined as an integrated voltage responsivity (VT) by NI LabVIEW software. Moreover, both the integrated voltage responsivity of the sensors and the reference signal of the photodiode were acquired, recorded and displayed using an NI LabVIEW system consisting of case NI PXIe-1082, controller NI PXIe-8135, data acquisition card NI PXIe-6366 and NI LabVIEW 2013 software.


A Meliorated Multi-Frequency Band Pyroelectric Sensor.

Hsiao CC, Liu SY, Siao AS - Sensors (Basel) (2015)

Schematic diagram for electrical signal treatment procedure.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4541877&req=5

sensors-15-16248-f005: Schematic diagram for electrical signal treatment procedure.
Mentions: The meliorated multi-frequency band pyroelectric sensor redeemed the drawbacks of the thinner and thicker ZnO pyroelectric films to integrate the electrical outputs generated from those films into an all-round signal. A schematic diagram of the signal treatment is shown in Figure 5. The voltage responsivity of VP was generated from the sputtered ZnO film for shouldering a high-frequency response, and the voltage responsivities of VA1, VA2 and VA3 were generated from the aerosol ZnO films for taking a low-frequency response. The integrated and treated electrical signal was VT. A responsivity measurement system, as seen in Figure 6, was used to evaluate the performance of the meliorated multi-frequency band ZnO thin-film pyroelectric sensor. This system consisted of an infrared laser, a programmable function generator, a prism, a photodiode, a beam expander, a beam equalizer, a low-noise voltage amplifier and NI LabVIEW system. The radiation source was a calibrated infrared (IR) laser with 900 nm wavelength and 7 mW maximum power. The IR laser beam was molded as a square wave with a modulated frequency (ω) by a programmable function generator. A prism was used to split the modulated beam into two beams, which had the same power: one was reflected on a photodiode as the reference signal, and the other was expanded and equalized via a beam expander and a beam equalizer such that the beam spot could uniformly cover the entire region of the top electrode of the sensors. The responsivities of VP, VA1, VA2 and VA3 were filtered, amplified, modulated, and combined as an integrated voltage responsivity (VT) by NI LabVIEW software. Moreover, both the integrated voltage responsivity of the sensors and the reference signal of the photodiode were acquired, recorded and displayed using an NI LabVIEW system consisting of case NI PXIe-1082, controller NI PXIe-8135, data acquisition card NI PXIe-6366 and NI LabVIEW 2013 software.

Bottom Line: The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes.The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor.The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan. cchsiao@nfu.edu.tw.

ABSTRACT
This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

No MeSH data available.