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Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type.

Tsai CH, Tsai CW, Chang HT, Liu SH, Tsai JC - Sensors (Basel) (2015)

Bottom Line: A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors.Electrothermal actuation has achieved a large angular movement in the micromirrors.Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

View Article: PubMed Central - PubMed

Affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.

ABSTRACT
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

No MeSH data available.


Related in: MedlinePlus

Schematic drawing of the experimental setup for tracing the light spot of the reflected laser beam.
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sensors-15-14745-f008: Schematic drawing of the experimental setup for tracing the light spot of the reflected laser beam.

Mentions: Figure 8 shows a schematic diagram of the experimental setup for measuring laser beam displacement. The beam steering capability of the mirror was verified by shining a HeNe laser beam on the mirror and tracing the light spot of the reflected beam on a screen. The applied current is increased from 0 to 0.04 A with an increment of 0.01 A. Figure 9 shows the movement of the light spot and the mirror postures at 0 A and 0.04 A. The shift of the light spot is clearly observed.


Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type.

Tsai CH, Tsai CW, Chang HT, Liu SH, Tsai JC - Sensors (Basel) (2015)

Schematic drawing of the experimental setup for tracing the light spot of the reflected laser beam.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4507607&req=5

sensors-15-14745-f008: Schematic drawing of the experimental setup for tracing the light spot of the reflected laser beam.
Mentions: Figure 8 shows a schematic diagram of the experimental setup for measuring laser beam displacement. The beam steering capability of the mirror was verified by shining a HeNe laser beam on the mirror and tracing the light spot of the reflected beam on a screen. The applied current is increased from 0 to 0.04 A with an increment of 0.01 A. Figure 9 shows the movement of the light spot and the mirror postures at 0 A and 0.04 A. The shift of the light spot is clearly observed.

Bottom Line: A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors.Electrothermal actuation has achieved a large angular movement in the micromirrors.Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

View Article: PubMed Central - PubMed

Affiliation: Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.

ABSTRACT
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

No MeSH data available.


Related in: MedlinePlus