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A New MEMS Gyroscope Used for Single-Channel Damping.

Zhang Z, Zhang W, Zhang F, Wang B - Sensors (Basel) (2015)

Bottom Line: It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure.The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively.These results demonstrate that both the design and sensing mechanism are correct.

View Article: PubMed Central - PubMed

Affiliation: School of Computer and Information Management, Inner Mongolia University of Finance and Economics, Hohhot 010070, China. 100002170@imufe.edu.cn.

ABSTRACT
The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure. It is installed on a rotating aircraft, and utilizes the aircraft spin to make its sensing element obtain angular momentum. When the aircraft is subjected to an angular rotation, a periodic Coriolis force is induced in the direction orthogonal to both the angular momentum and the angular velocity input axis. This novel MEMS gyroscope can thus sense angular velocity inputs. The output sensing signal is exactly an amplitude-modulation signal. Its envelope is proportional to the input angular velocity, and the carrier frequency corresponds to the spin frequency of the rotating aircraft, so the MEMS gyroscope can not only sense the transverse angular rotation of an aircraft, but also automatically change the carrier frequency over the change of spin frequency, making it very suitable for the damping of a single-channel control system of a rotating aircraft. In this paper, the motion equation of the MEMS gyroscope has been derived. Then, an analysis has been carried to solve the motion equation and dynamic parameters. Finally, an experimental validation has been done based on a precision three axis rate table. The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively. These results demonstrate that both the design and sensing mechanism are correct.

No MeSH data available.


Related in: MedlinePlus

The packaging schematic.
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sensors-15-10146-f002: The packaging schematic.

Mentions: In most of the reported MEMS vibratory rate gyroscopes, the proof-mass is driven into resonance in the drive direction by an external sinusoidal electrostatic or electromagnetic force. Ideally, it is desired to utilize resonance in both the drive and the sense modes. This is typically achieved by designing and if needed tuning the drive and sense resonant frequencies to match. Alternatively, the sense-mode is designed to be slightly shifted from the drive-mode to improve robustness and thermal stability, while intentionally sacrificing gain and sensitivity [11]. The MEMS gyroscope introduced in this paper is a non-driven gyro. The proof-mass does not utilize any drive force such as an electrostatic or electromagnetic force to attain angular momentum. Here, the sensing element is packaged under a nitrogen environment, but is not vacuum packaged. As shown in Figure 2, the use of a squeezed film to produce a damping moment is desired.


A New MEMS Gyroscope Used for Single-Channel Damping.

Zhang Z, Zhang W, Zhang F, Wang B - Sensors (Basel) (2015)

The packaging schematic.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4481988&req=5

sensors-15-10146-f002: The packaging schematic.
Mentions: In most of the reported MEMS vibratory rate gyroscopes, the proof-mass is driven into resonance in the drive direction by an external sinusoidal electrostatic or electromagnetic force. Ideally, it is desired to utilize resonance in both the drive and the sense modes. This is typically achieved by designing and if needed tuning the drive and sense resonant frequencies to match. Alternatively, the sense-mode is designed to be slightly shifted from the drive-mode to improve robustness and thermal stability, while intentionally sacrificing gain and sensitivity [11]. The MEMS gyroscope introduced in this paper is a non-driven gyro. The proof-mass does not utilize any drive force such as an electrostatic or electromagnetic force to attain angular momentum. Here, the sensing element is packaged under a nitrogen environment, but is not vacuum packaged. As shown in Figure 2, the use of a squeezed film to produce a damping moment is desired.

Bottom Line: It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure.The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively.These results demonstrate that both the design and sensing mechanism are correct.

View Article: PubMed Central - PubMed

Affiliation: School of Computer and Information Management, Inner Mongolia University of Finance and Economics, Hohhot 010070, China. 100002170@imufe.edu.cn.

ABSTRACT
The silicon micromechanical gyroscope, which will be introduced in this paper, represents a novel MEMS gyroscope concept. It is used for the damping of a single-channel control system of rotating aircraft. It differs from common MEMS gyroscopes in that does not have a drive structure, itself, and only has a sense structure. It is installed on a rotating aircraft, and utilizes the aircraft spin to make its sensing element obtain angular momentum. When the aircraft is subjected to an angular rotation, a periodic Coriolis force is induced in the direction orthogonal to both the angular momentum and the angular velocity input axis. This novel MEMS gyroscope can thus sense angular velocity inputs. The output sensing signal is exactly an amplitude-modulation signal. Its envelope is proportional to the input angular velocity, and the carrier frequency corresponds to the spin frequency of the rotating aircraft, so the MEMS gyroscope can not only sense the transverse angular rotation of an aircraft, but also automatically change the carrier frequency over the change of spin frequency, making it very suitable for the damping of a single-channel control system of a rotating aircraft. In this paper, the motion equation of the MEMS gyroscope has been derived. Then, an analysis has been carried to solve the motion equation and dynamic parameters. Finally, an experimental validation has been done based on a precision three axis rate table. The correlation coefficients between the tested data and the theoretical values are 0.9969, 0.9872 and 0.9842, respectively. These results demonstrate that both the design and sensing mechanism are correct.

No MeSH data available.


Related in: MedlinePlus