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A resonant pressure microsensor capable of self-temperature compensation.

Li Y, Wang J, Luo Z, Chen D, Chen J - Sensors (Basel) (2015)

Bottom Line: This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors.Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed.Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. yzngb@163.com.

ABSTRACT
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped "H" type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

No MeSH data available.


Surface plot of the pressure compensation error as a function of temperature and pressure, which is less than ±0.01% F.S. (pressure range of 50 kPa to 110 kPa and temperature range of −40 °C to 70 °C).
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sensors-15-10048-f005: Surface plot of the pressure compensation error as a function of temperature and pressure, which is less than ±0.01% F.S. (pressure range of 50 kPa to 110 kPa and temperature range of −40 °C to 70 °C).

Mentions: The difference (error) between the experimental results of pk and the compensated pressure value p(f1k, f2k) is represented by Δk. The 3D surface plot of this error is shown in Figure 5. The compensation error was less than ±0.01% of full pressure scale (50 kPa~110 kPa) in the full temperature range (−40 °C~70 °C).


A resonant pressure microsensor capable of self-temperature compensation.

Li Y, Wang J, Luo Z, Chen D, Chen J - Sensors (Basel) (2015)

Surface plot of the pressure compensation error as a function of temperature and pressure, which is less than ±0.01% F.S. (pressure range of 50 kPa to 110 kPa and temperature range of −40 °C to 70 °C).
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4481888&req=5

sensors-15-10048-f005: Surface plot of the pressure compensation error as a function of temperature and pressure, which is less than ±0.01% F.S. (pressure range of 50 kPa to 110 kPa and temperature range of −40 °C to 70 °C).
Mentions: The difference (error) between the experimental results of pk and the compensated pressure value p(f1k, f2k) is represented by Δk. The 3D surface plot of this error is shown in Figure 5. The compensation error was less than ±0.01% of full pressure scale (50 kPa~110 kPa) in the full temperature range (−40 °C~70 °C).

Bottom Line: This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors.Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed.Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. yzngb@163.com.

ABSTRACT
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped "H" type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

No MeSH data available.