Limits...
A resonant pressure microsensor capable of self-temperature compensation.

Li Y, Wang J, Luo Z, Chen D, Chen J - Sensors (Basel) (2015)

Bottom Line: This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors.Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed.Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. yzngb@163.com.

ABSTRACT
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped "H" type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

No MeSH data available.


The self-temperature compensation flow chart includes three main steps: Calibration, binary data fitting, and pressure measurement. In the calibration step, the frequencies of the central beam and side beam were measured at each temperature and pressure point. These groups of data were fitted in binary data fitting step to obtain the self-temperature compensation function. Then this function was programmed into the post processing unit of the sensor in pressure measurement step to calculate the pressure in real time.
© Copyright Policy
Related In: Results  -  Collection

License
getmorefigures.php?uid=PMC4481888&req=5

sensors-15-10048-f002: The self-temperature compensation flow chart includes three main steps: Calibration, binary data fitting, and pressure measurement. In the calibration step, the frequencies of the central beam and side beam were measured at each temperature and pressure point. These groups of data were fitted in binary data fitting step to obtain the self-temperature compensation function. Then this function was programmed into the post processing unit of the sensor in pressure measurement step to calculate the pressure in real time.

Mentions: The complete self-temperature compensation process is summarized in Figure 2. As the first step, certain calibration points in the full temperature and pressure scales were selected with two resonant frequencies quantified. Secondly, polynomial surface fitting with the calibration data was conducted to obtain the self-temperature compensation function. Third, this compensation function was programmed into the post processing unit of the sensor, and thus the pressure microsensor can function in the of self-temperature compensation mode.


A resonant pressure microsensor capable of self-temperature compensation.

Li Y, Wang J, Luo Z, Chen D, Chen J - Sensors (Basel) (2015)

The self-temperature compensation flow chart includes three main steps: Calibration, binary data fitting, and pressure measurement. In the calibration step, the frequencies of the central beam and side beam were measured at each temperature and pressure point. These groups of data were fitted in binary data fitting step to obtain the self-temperature compensation function. Then this function was programmed into the post processing unit of the sensor in pressure measurement step to calculate the pressure in real time.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4481888&req=5

sensors-15-10048-f002: The self-temperature compensation flow chart includes three main steps: Calibration, binary data fitting, and pressure measurement. In the calibration step, the frequencies of the central beam and side beam were measured at each temperature and pressure point. These groups of data were fitted in binary data fitting step to obtain the self-temperature compensation function. Then this function was programmed into the post processing unit of the sensor in pressure measurement step to calculate the pressure in real time.
Mentions: The complete self-temperature compensation process is summarized in Figure 2. As the first step, certain calibration points in the full temperature and pressure scales were selected with two resonant frequencies quantified. Secondly, polynomial surface fitting with the calibration data was conducted to obtain the self-temperature compensation function. Third, this compensation function was programmed into the post processing unit of the sensor, and thus the pressure microsensor can function in the of self-temperature compensation mode.

Bottom Line: This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors.Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed.Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. yzngb@163.com.

ABSTRACT
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped "H" type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of -40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

No MeSH data available.