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Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3.

Zhang G, Wu H, Chen C, Wang T, Yue J, Liu C - Nanoscale Res Lett (2015)

Bottom Line: A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3.Moreover, a low leakage current density of 3.9 × 10(-8) A/cm(2) at 1 V has been realized.The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, School of Physics and Technology, Wuhan University, Wuhan, 430072 People's Republic of China.

ABSTRACT
Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3 dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10(-8) A/cm(2) at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

No MeSH data available.


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Schematic diagram of the flexible capacitors and transmittance spectra in the wavelength range from 300 to 800 nm. (a) The schematic diagram of transparent and flexible capacitors. (b) The optical transmittance spectra of the capacitor device. The inset of (b) is the photograph of the capacitor device.
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Fig1: Schematic diagram of the flexible capacitors and transmittance spectra in the wavelength range from 300 to 800 nm. (a) The schematic diagram of transparent and flexible capacitors. (b) The optical transmittance spectra of the capacitor device. The inset of (b) is the photograph of the capacitor device.

Mentions: Figure 1a shows the schematic diagram of the flexible capacitors. Figure 1b shows the transmittance spectra in the wavelength range from 300 to 800 nm. An average optical transmittance of more than 70% was observed, which is valuable for applications in transparent electronics. As shown from the inset of Figure 1b, the Chinese characters “Wuhan University” can be clearly seen through the transparent capacitor device.Figure 1


Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3.

Zhang G, Wu H, Chen C, Wang T, Yue J, Liu C - Nanoscale Res Lett (2015)

Schematic diagram of the flexible capacitors and transmittance spectra in the wavelength range from 300 to 800 nm. (a) The schematic diagram of transparent and flexible capacitors. (b) The optical transmittance spectra of the capacitor device. The inset of (b) is the photograph of the capacitor device.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4385106&req=5

Fig1: Schematic diagram of the flexible capacitors and transmittance spectra in the wavelength range from 300 to 800 nm. (a) The schematic diagram of transparent and flexible capacitors. (b) The optical transmittance spectra of the capacitor device. The inset of (b) is the photograph of the capacitor device.
Mentions: Figure 1a shows the schematic diagram of the flexible capacitors. Figure 1b shows the transmittance spectra in the wavelength range from 300 to 800 nm. An average optical transmittance of more than 70% was observed, which is valuable for applications in transparent electronics. As shown from the inset of Figure 1b, the Chinese characters “Wuhan University” can be clearly seen through the transparent capacitor device.Figure 1

Bottom Line: A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3.Moreover, a low leakage current density of 3.9 × 10(-8) A/cm(2) at 1 V has been realized.The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, School of Physics and Technology, Wuhan University, Wuhan, 430072 People's Republic of China.

ABSTRACT
Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3 dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm(2) at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10(-8) A/cm(2) at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

No MeSH data available.


Related in: MedlinePlus