Limits...
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.

Lin J, Xu Y, Fang Z, Wang M, Song J, Wang N, Qiao L, Fang W, Cheng Y - Sci Rep (2015)

Bottom Line: We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling.The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength.The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

View Article: PubMed Central - PubMed

Affiliation: 1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.

ABSTRACT
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

No MeSH data available.


Related in: MedlinePlus

(a) Transmission spectrum of the fiber taper coupled with the microresonator (diameter ~55 μm) before annealing, (b) Lorentzian fit (red solid line) of measured spectrum around the resonant wavelength (indicated by the left blue arrow inFig. 3(a)) at 1554.28 nm (black dotted line), showing a Q factor of 5.2 × 104, (c) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~55 μm) after annealing around the resonant wavelength at 1554.90 nm (black dotted line), showing an improved Q factor of 1.6 × 105, (d) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~82 μm) after annealing around the resonant wavelength at 1553.83 nm (black dotted line), showing an improved Q factor of 2.5 × 105.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
getmorefigures.php?uid=PMC4308694&req=5

f3: (a) Transmission spectrum of the fiber taper coupled with the microresonator (diameter ~55 μm) before annealing, (b) Lorentzian fit (red solid line) of measured spectrum around the resonant wavelength (indicated by the left blue arrow inFig. 3(a)) at 1554.28 nm (black dotted line), showing a Q factor of 5.2 × 104, (c) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~55 μm) after annealing around the resonant wavelength at 1554.90 nm (black dotted line), showing an improved Q factor of 1.6 × 105, (d) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~82 μm) after annealing around the resonant wavelength at 1553.83 nm (black dotted line), showing an improved Q factor of 2.5 × 105.

Mentions: To measure the Q-factor of the fabricated LN microresonators, an evanescent fiber taper coupling method was employed (for details, see Methods). The transmitted spectrum measured from the output end of the fiber taper showed a series of sharp dips at the WGM resonant wavelengths. In these measurements, coarse scans over a wide wavelength span were first performed to decide the WGM resonant wavelengths. As an example, the transmission spectrum obtained with the coarse scan with a step size of 1 nm for the 55 μm LN microresonator without annealing is shown in Fig. 3(a). After the coarse scan, fine scans with a step size of 0.5 pm around the resonant wavelengths were performed to measure the linewidths of the dips indicated by the Lorentzian fit.


Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.

Lin J, Xu Y, Fang Z, Wang M, Song J, Wang N, Qiao L, Fang W, Cheng Y - Sci Rep (2015)

(a) Transmission spectrum of the fiber taper coupled with the microresonator (diameter ~55 μm) before annealing, (b) Lorentzian fit (red solid line) of measured spectrum around the resonant wavelength (indicated by the left blue arrow inFig. 3(a)) at 1554.28 nm (black dotted line), showing a Q factor of 5.2 × 104, (c) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~55 μm) after annealing around the resonant wavelength at 1554.90 nm (black dotted line), showing an improved Q factor of 1.6 × 105, (d) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~82 μm) after annealing around the resonant wavelength at 1553.83 nm (black dotted line), showing an improved Q factor of 2.5 × 105.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4308694&req=5

f3: (a) Transmission spectrum of the fiber taper coupled with the microresonator (diameter ~55 μm) before annealing, (b) Lorentzian fit (red solid line) of measured spectrum around the resonant wavelength (indicated by the left blue arrow inFig. 3(a)) at 1554.28 nm (black dotted line), showing a Q factor of 5.2 × 104, (c) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~55 μm) after annealing around the resonant wavelength at 1554.90 nm (black dotted line), showing an improved Q factor of 1.6 × 105, (d) Lorentzian fit (red solid line) of measured transmission spectrum of the microresonator (diameter ~82 μm) after annealing around the resonant wavelength at 1553.83 nm (black dotted line), showing an improved Q factor of 2.5 × 105.
Mentions: To measure the Q-factor of the fabricated LN microresonators, an evanescent fiber taper coupling method was employed (for details, see Methods). The transmitted spectrum measured from the output end of the fiber taper showed a series of sharp dips at the WGM resonant wavelengths. In these measurements, coarse scans over a wide wavelength span were first performed to decide the WGM resonant wavelengths. As an example, the transmission spectrum obtained with the coarse scan with a step size of 1 nm for the 55 μm LN microresonator without annealing is shown in Fig. 3(a). After the coarse scan, fine scans with a step size of 0.5 pm around the resonant wavelengths were performed to measure the linewidths of the dips indicated by the Lorentzian fit.

Bottom Line: We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling.The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength.The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

View Article: PubMed Central - PubMed

Affiliation: 1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.

ABSTRACT
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

No MeSH data available.


Related in: MedlinePlus