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Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.

Lin J, Xu Y, Fang Z, Wang M, Song J, Wang N, Qiao L, Fang W, Cheng Y - Sci Rep (2015)

Bottom Line: We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling.The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength.The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

View Article: PubMed Central - PubMed

Affiliation: 1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.

ABSTRACT
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

No MeSH data available.


Related in: MedlinePlus

Procedures of fabrication of a LN microresonator by water-assisted femtosecond laser ablation, followed by FIB milling, selective chemical etching, and annealing.
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f1: Procedures of fabrication of a LN microresonator by water-assisted femtosecond laser ablation, followed by FIB milling, selective chemical etching, and annealing.

Mentions: We establish a new technique to fabricate on-chip high-Q sub-millimeter LN microresonators. The concept of our technique is briefly introduced in Fig. 1. We fabricate the microresonator on an LN thin film which is formed by bonding an ion-sliced LN thin film onto a LN substrate with a sandwiched silica layer17. As schematically illustrated in Fig. 1, the procedure of fabrication consists of (1) femtosecond laser ablation of the thin film sample which is immersed in water to form a cylindrical post with a total height of ~15 μm1819, (2) smoothing the peripheries of the cylindrical post by FIB milling20, (3) chemical wet etching of the fabricated sample in a solution of 5% hydrofluoric (HF) diluted with water to form the freestanding LN microdisk on silica pedestal by selectively removing the silica layer under the LN thin film, and (4) high temperature annealing of the sample to further promote the Q-factor.


Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.

Lin J, Xu Y, Fang Z, Wang M, Song J, Wang N, Qiao L, Fang W, Cheng Y - Sci Rep (2015)

Procedures of fabrication of a LN microresonator by water-assisted femtosecond laser ablation, followed by FIB milling, selective chemical etching, and annealing.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC4308694&req=5

f1: Procedures of fabrication of a LN microresonator by water-assisted femtosecond laser ablation, followed by FIB milling, selective chemical etching, and annealing.
Mentions: We establish a new technique to fabricate on-chip high-Q sub-millimeter LN microresonators. The concept of our technique is briefly introduced in Fig. 1. We fabricate the microresonator on an LN thin film which is formed by bonding an ion-sliced LN thin film onto a LN substrate with a sandwiched silica layer17. As schematically illustrated in Fig. 1, the procedure of fabrication consists of (1) femtosecond laser ablation of the thin film sample which is immersed in water to form a cylindrical post with a total height of ~15 μm1819, (2) smoothing the peripheries of the cylindrical post by FIB milling20, (3) chemical wet etching of the fabricated sample in a solution of 5% hydrofluoric (HF) diluted with water to form the freestanding LN microdisk on silica pedestal by selectively removing the silica layer under the LN thin film, and (4) high temperature annealing of the sample to further promote the Q-factor.

Bottom Line: We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling.The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength.The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

View Article: PubMed Central - PubMed

Affiliation: 1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.

ABSTRACT
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

No MeSH data available.


Related in: MedlinePlus