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A high temperature capacitive pressure sensor based on alumina ceramic for in situ measurement at 600 °C.

Tan Q, Li C, Xiong J, Jia P, Zhang W, Liu J, Xue C, Hong Y, Ren Z, Luo T - Sensors (Basel) (2014)

Bottom Line: The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min.The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup.At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulin.99@163.com.

ABSTRACT
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

No MeSH data available.


Resonant frequency of the sensor at 850 °C versus time.
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f10-sensors-14-02417: Resonant frequency of the sensor at 850 °C versus time.

Mentions: Figure 10 shows the image of the sensor resonant frequency at 850 °C as a function of time. It is clear that the resonant frequency of the sensor remains stable and drifts only slightly after being at 850 °C for 20 min, and, beyond this range, the frequency of the sensor will not be stable, which verifies the stability and availability of the sensor in high-temperature environments. In order to reduce the frequency of the sensor drift as the temperature increases, the geometric structure parameters of the sensor should be optimized.


A high temperature capacitive pressure sensor based on alumina ceramic for in situ measurement at 600 °C.

Tan Q, Li C, Xiong J, Jia P, Zhang W, Liu J, Xue C, Hong Y, Ren Z, Luo T - Sensors (Basel) (2014)

Resonant frequency of the sensor at 850 °C versus time.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3958212&req=5

f10-sensors-14-02417: Resonant frequency of the sensor at 850 °C versus time.
Mentions: Figure 10 shows the image of the sensor resonant frequency at 850 °C as a function of time. It is clear that the resonant frequency of the sensor remains stable and drifts only slightly after being at 850 °C for 20 min, and, beyond this range, the frequency of the sensor will not be stable, which verifies the stability and availability of the sensor in high-temperature environments. In order to reduce the frequency of the sensor drift as the temperature increases, the geometric structure parameters of the sensor should be optimized.

Bottom Line: The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min.The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup.At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

View Article: PubMed Central - PubMed

Affiliation: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China. tanqiulin.99@163.com.

ABSTRACT
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.

No MeSH data available.