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Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting

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ABSTRACT

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration of brittle mode machining based on micro crack propagation. Fused silica glass, a high purity synthetic amorphous silicon dioxide, is selected as a workpiece material. It has a very low thermal expansion coefficient and excellent optical qualities and exceptional transmittance over a wide spectral range, especially in the ultraviolet range. The powder blasting process parameters affecting the machined results are injection pressure, abrasive particle size and density, stand-off distance, number of nozzle scanning, and shape/size of the required patterns. In this study, the influence of the number of nozzle scanning, abrasive particle size, and pattern size on the formation of micro channels is investigated. Machined shapes and surface roughness are measured using a 3-dimensional vision profiler and the results are discussed.

No MeSH data available.


Channel depth variations according to the number of nozzle scanning.
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f11-sensors-08-00700: Channel depth variations according to the number of nozzle scanning.

Mentions: Figure 11 shows machined depth variation according to increasing number of nozzle scanning for (a) 200μm and (b) 300μm channels, respectively. In the figure, it can be observed that the machined depth after 20th scan deviates a little from the linearity. This is due to the “blast lag effect”, which is caused by the increase of particle impact angle to sidewall as masked line width increases. [10] The smaller the channel, the sooner this effect occurs. The top width of a channel increases during blasting, thus increasing rate of the erosion depth is accelerated.


Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting
Channel depth variations according to the number of nozzle scanning.
© Copyright Policy
Related In: Results  -  Collection

Show All Figures
getmorefigures.php?uid=PMC3927535&req=5

f11-sensors-08-00700: Channel depth variations according to the number of nozzle scanning.
Mentions: Figure 11 shows machined depth variation according to increasing number of nozzle scanning for (a) 200μm and (b) 300μm channels, respectively. In the figure, it can be observed that the machined depth after 20th scan deviates a little from the linearity. This is due to the “blast lag effect”, which is caused by the increase of particle impact angle to sidewall as masked line width increases. [10] The smaller the channel, the sooner this effect occurs. The top width of a channel increases during blasting, thus increasing rate of the erosion depth is accelerated.

View Article: PubMed Central - PubMed

ABSTRACT

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration of brittle mode machining based on micro crack propagation. Fused silica glass, a high purity synthetic amorphous silicon dioxide, is selected as a workpiece material. It has a very low thermal expansion coefficient and excellent optical qualities and exceptional transmittance over a wide spectral range, especially in the ultraviolet range. The powder blasting process parameters affecting the machined results are injection pressure, abrasive particle size and density, stand-off distance, number of nozzle scanning, and shape/size of the required patterns. In this study, the influence of the number of nozzle scanning, abrasive particle size, and pattern size on the formation of micro channels is investigated. Machined shapes and surface roughness are measured using a 3-dimensional vision profiler and the results are discussed.

No MeSH data available.