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Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

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ABSTRACT

The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.

No MeSH data available.


Experimental set-up on the Fogale Zoomsurf 3D.
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f3-sensors-08-00767: Experimental set-up on the Fogale Zoomsurf 3D.

Mentions: Frequency shift measures were preceded by accurate profilometric measures in order to know with high precision the dimensions of the specimen. Both kinds of measures were performed with the Fogale Zoomsurf 3D optical profiling system (Figure 3). This system is based on non-contact optical interferometry [19]: the recorded light intensity is detected by a CCD pixel as a function of the specimen height, thus defining either the profile of the monitored specimen or its vertical position. The maximum lateral resolution is similar to the one of conventional optical microscopes (diffraction limited, 0.6 μm with a 20X objective), while the vertical resolution may reach 0.1 nm.


Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Experimental set-up on the Fogale Zoomsurf 3D.
© Copyright Policy
Related In: Results  -  Collection

Show All Figures
getmorefigures.php?uid=PMC3927528&req=5

f3-sensors-08-00767: Experimental set-up on the Fogale Zoomsurf 3D.
Mentions: Frequency shift measures were preceded by accurate profilometric measures in order to know with high precision the dimensions of the specimen. Both kinds of measures were performed with the Fogale Zoomsurf 3D optical profiling system (Figure 3). This system is based on non-contact optical interferometry [19]: the recorded light intensity is detected by a CCD pixel as a function of the specimen height, thus defining either the profile of the monitored specimen or its vertical position. The maximum lateral resolution is similar to the one of conventional optical microscopes (diffraction limited, 0.6 μm with a 20X objective), while the vertical resolution may reach 0.1 nm.

View Article: PubMed Central - PubMed

ABSTRACT

The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.

No MeSH data available.