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Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient

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ABSTRACT

The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.

No MeSH data available.


Schematic cantilever beam profile with geometrical dimensional parameters.
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f2-sensors-08-00767: Schematic cantilever beam profile with geometrical dimensional parameters.

Mentions: The structures tested in this work were produced on two different wafers, in the first one (set 1, 2, 3) beams of increasing length are grouped in sets. In the second wafer (set 4, 5, 6) each set is composed by identical beams but thickness varies from one set to the other. Experimental images of the specimen were analyzed on the basis of the IRST fabrication process technical memo in order to extrapolate a simplified profile, being the real profile quite irregular (Figure 2).


Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Schematic cantilever beam profile with geometrical dimensional parameters.
© Copyright Policy
Related In: Results  -  Collection

Show All Figures
getmorefigures.php?uid=PMC3927528&req=5

f2-sensors-08-00767: Schematic cantilever beam profile with geometrical dimensional parameters.
Mentions: The structures tested in this work were produced on two different wafers, in the first one (set 1, 2, 3) beams of increasing length are grouped in sets. In the second wafer (set 4, 5, 6) each set is composed by identical beams but thickness varies from one set to the other. Experimental images of the specimen were analyzed on the basis of the IRST fabrication process technical memo in order to extrapolate a simplified profile, being the real profile quite irregular (Figure 2).

View Article: PubMed Central - PubMed

ABSTRACT

The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and curvature and then identifying the residual stress model by means of frequency shift behaviour is presented. A comparison with different numerical FEM models and experimental results has been carried out, introducing in the model the residual stress of the structures, responsible for an initial upward curvature. Dynamic spectrum data are measured via optical interferometry and experimental frequency shift curves are obtained by increasing the dc voltage applied to the specimens. A good correspondence is pointed out between measures and numerical models so that the residual stress effect can be evaluated for different configurations.

No MeSH data available.