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Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

View Article: PubMed Central

ABSTRACT

In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electrothermal fields coupling and a one-way sequential thermal-structural fields coupling. An automated substructuring code was developed to reduce the computational cost involved in simulating this complicated coupled multiphysics FE analysis by up to 76 percent. The substructured multiphysics model was then used to conduct a parametric study of the MEMS-based gas sensor performance in response to the variations expected in the thermal and mechanical characteristics of thin films layers composing the sensing MEMS device generated at various stages of the microfabrication process. Whenever possible, the appropriate deposition variables were correlated in the current work to the design parameters, with good accuracy, for optimum operation conditions of the gas sensor. This is used to establish a set of design rules, using linear and nonlinear empirical relations, which can be utilized in real-time at the design and development decision-making stages of similar gas sensors to enable the microfabrication of these sensors with reliable operation.

No MeSH data available.


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Effect of the variation of Young's modulus and deposition residual stress for Si3N4 on the expected fatigue life of the gas sensor
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f16-sensors-07-00319: Effect of the variation of Young's modulus and deposition residual stress for Si3N4 on the expected fatigue life of the gas sensor

Mentions: The same effect is obtained when varying and N with at different values of δσres, as shown in Figures 15 and 16, respectively. However a wider range for variation (0.8 to 0.95) is found to provide safer operating conditions under thermal cyclic loading regardless of the value of δσres.


Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors
Effect of the variation of Young's modulus and deposition residual stress for Si3N4 on the expected fatigue life of the gas sensor
© Copyright Policy
Related In: Results  -  Collection

Show All Figures
getmorefigures.php?uid=PMC3756723&req=5

f16-sensors-07-00319: Effect of the variation of Young's modulus and deposition residual stress for Si3N4 on the expected fatigue life of the gas sensor
Mentions: The same effect is obtained when varying and N with at different values of δσres, as shown in Figures 15 and 16, respectively. However a wider range for variation (0.8 to 0.95) is found to provide safer operating conditions under thermal cyclic loading regardless of the value of δσres.

View Article: PubMed Central

ABSTRACT

In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electrothermal fields coupling and a one-way sequential thermal-structural fields coupling. An automated substructuring code was developed to reduce the computational cost involved in simulating this complicated coupled multiphysics FE analysis by up to 76 percent. The substructured multiphysics model was then used to conduct a parametric study of the MEMS-based gas sensor performance in response to the variations expected in the thermal and mechanical characteristics of thin films layers composing the sensing MEMS device generated at various stages of the microfabrication process. Whenever possible, the appropriate deposition variables were correlated in the current work to the design parameters, with good accuracy, for optimum operation conditions of the gas sensor. This is used to establish a set of design rules, using linear and nonlinear empirical relations, which can be utilized in real-time at the design and development decision-making stages of similar gas sensors to enable the microfabrication of these sensors with reliable operation.

No MeSH data available.


Related in: MedlinePlus