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Femtosecond laser processing by using patterned vector optical fields.

Lou K, Qian SX, Ren ZC, Tu C, Li Y, Wang HT - Sci Rep (2013)

Bottom Line: The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator.The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon.The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.

View Article: PubMed Central - PubMed

Affiliation: MOE Key Laboratory of Weak Light Nonlinear Photonics and School of Physics, Nankai University, Tianjin 300071, China.

ABSTRACT
We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator. The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon. The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.

No MeSH data available.


Related in: MedlinePlus

Fabrication of multi-microholes by the fs PVOF composed of four identical AV-LP-VFs with m = 1 and a = 1.0 mm.(a) and (b) are the two generated PVOFs composed of four identical radially-polarized and azimuthally-polarized fields, respectively, which arrange a square, where the arrows show the SoP configurations. (c) shows the simulated focal ring of the focused individual AV-LP-VF. (d) is the simulated interference pattern with a tetragonal lattice of four individual fields. (e) indicates the simulated pattern of the focused PVOF, which contains eight bright spots. (c)–(e) have a dimension of 60 × 60 μm2. (f) is the SEM image of the multi-microholes fabricated by 50 pulses at a fluence of about 6.9 J/cm2.
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f2: Fabrication of multi-microholes by the fs PVOF composed of four identical AV-LP-VFs with m = 1 and a = 1.0 mm.(a) and (b) are the two generated PVOFs composed of four identical radially-polarized and azimuthally-polarized fields, respectively, which arrange a square, where the arrows show the SoP configurations. (c) shows the simulated focal ring of the focused individual AV-LP-VF. (d) is the simulated interference pattern with a tetragonal lattice of four individual fields. (e) indicates the simulated pattern of the focused PVOF, which contains eight bright spots. (c)–(e) have a dimension of 60 × 60 μm2. (f) is the SEM image of the multi-microholes fabricated by 50 pulses at a fluence of about 6.9 J/cm2.

Mentions: Differently from the case in Fig. 1, we now explore experimentally the fabrication of multi-microholes by the PVOFs composed of four identical AV-LP-VFs with m = 1 and a = 1.0 (Fig. 2). As shown in Figs. 2a and 2b, four radially-polarized (ϕj0 = 0, where j = 1 ~ 4) and four azimuthally-polarized (ϕj0 = π/2) fields have the same arrangement as Figs. 1a and 1b, respectively. The simulation results and the above theory reveal a fact that the m = 1 AV-LP-VF for any ϕ0 is always focused into the same focal ring (Fig. 2c) instead of the Airy spot. The simulated interference pattern described by the interference factor P also exhibits a tetragonal lattice (Fig. 2d). It should be pointed out that the patterns in Figs. 1d and 2d exhibit both the same tetragonal lattice and the same lattice period, but both exist a shift with a 1/2 lattice period in the x′ and y′ directions. The simulated intensity pattern of the focused PVOFs in Figs. 2a and 2b contains eight bright spots forming a square (Fig. 2e), which originates from the splitting of the focal ring due to the modulation of the interference factor of the four individual AV-LP-VFs. At a fluence of about 6.9 J/cm2, eight microholes are punched on the silicon surface by 50 pulses (Fig. 2f), like the focal intensity pattern (Fig. 2e).


Femtosecond laser processing by using patterned vector optical fields.

Lou K, Qian SX, Ren ZC, Tu C, Li Y, Wang HT - Sci Rep (2013)

Fabrication of multi-microholes by the fs PVOF composed of four identical AV-LP-VFs with m = 1 and a = 1.0 mm.(a) and (b) are the two generated PVOFs composed of four identical radially-polarized and azimuthally-polarized fields, respectively, which arrange a square, where the arrows show the SoP configurations. (c) shows the simulated focal ring of the focused individual AV-LP-VF. (d) is the simulated interference pattern with a tetragonal lattice of four individual fields. (e) indicates the simulated pattern of the focused PVOF, which contains eight bright spots. (c)–(e) have a dimension of 60 × 60 μm2. (f) is the SEM image of the multi-microholes fabricated by 50 pulses at a fluence of about 6.9 J/cm2.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3722566&req=5

f2: Fabrication of multi-microholes by the fs PVOF composed of four identical AV-LP-VFs with m = 1 and a = 1.0 mm.(a) and (b) are the two generated PVOFs composed of four identical radially-polarized and azimuthally-polarized fields, respectively, which arrange a square, where the arrows show the SoP configurations. (c) shows the simulated focal ring of the focused individual AV-LP-VF. (d) is the simulated interference pattern with a tetragonal lattice of four individual fields. (e) indicates the simulated pattern of the focused PVOF, which contains eight bright spots. (c)–(e) have a dimension of 60 × 60 μm2. (f) is the SEM image of the multi-microholes fabricated by 50 pulses at a fluence of about 6.9 J/cm2.
Mentions: Differently from the case in Fig. 1, we now explore experimentally the fabrication of multi-microholes by the PVOFs composed of four identical AV-LP-VFs with m = 1 and a = 1.0 (Fig. 2). As shown in Figs. 2a and 2b, four radially-polarized (ϕj0 = 0, where j = 1 ~ 4) and four azimuthally-polarized (ϕj0 = π/2) fields have the same arrangement as Figs. 1a and 1b, respectively. The simulation results and the above theory reveal a fact that the m = 1 AV-LP-VF for any ϕ0 is always focused into the same focal ring (Fig. 2c) instead of the Airy spot. The simulated interference pattern described by the interference factor P also exhibits a tetragonal lattice (Fig. 2d). It should be pointed out that the patterns in Figs. 1d and 2d exhibit both the same tetragonal lattice and the same lattice period, but both exist a shift with a 1/2 lattice period in the x′ and y′ directions. The simulated intensity pattern of the focused PVOFs in Figs. 2a and 2b contains eight bright spots forming a square (Fig. 2e), which originates from the splitting of the focal ring due to the modulation of the interference factor of the four individual AV-LP-VFs. At a fluence of about 6.9 J/cm2, eight microholes are punched on the silicon surface by 50 pulses (Fig. 2f), like the focal intensity pattern (Fig. 2e).

Bottom Line: The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator.The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon.The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.

View Article: PubMed Central - PubMed

Affiliation: MOE Key Laboratory of Weak Light Nonlinear Photonics and School of Physics, Nankai University, Tianjin 300071, China.

ABSTRACT
We present and demonstrate an approach for femtosecond laser processing by using patterned vector optical fields (PVOFs) composed of multiple individual vector optical fields. The PVOFs can be flexibly engineered due to the diversity of individual vector optical fields in spatial arrangement and distribution of states of polarization, and it is easily created with the aid of a spatial light modulator. The focused PVOFs will certainly result in various interference patterns, which are then used to fabricate multi-microholes with various patterns on silicon. The present approach can be expanded to fabricate three-dimensional microstructures based on two-photon polymerization.

No MeSH data available.


Related in: MedlinePlus