Limits...
A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing region is close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.

No MeSH data available.


Iteration numbers to achieve the convergence versus the distance separating electrode at 1V and the micro-beam
© Copyright Policy
Related In: Results  -  Collection


getmorefigures.php?uid=PMC3673000&req=5

f7-sensors-08-00994: Iteration numbers to achieve the convergence versus the distance separating electrode at 1V and the micro-beam

Mentions: In order to highlight the relationship between the distance separating the micro-beam and electrode at 1V and the number of iterations required to achieve the convergence without and with Aitken ac-celeration [16], several positions d1 of the micro-device are considered (Fig. 7). For each of them, the perturbation problem is solved and an iterative process is carried out till the relative error of the local electric field is smaller than 1%.


A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS
Iteration numbers to achieve the convergence versus the distance separating electrode at 1V and the micro-beam
© Copyright Policy
Related In: Results  -  Collection

Show All Figures
getmorefigures.php?uid=PMC3673000&req=5

f7-sensors-08-00994: Iteration numbers to achieve the convergence versus the distance separating electrode at 1V and the micro-beam
Mentions: In order to highlight the relationship between the distance separating the micro-beam and electrode at 1V and the number of iterations required to achieve the convergence without and with Aitken ac-celeration [16], several positions d1 of the micro-device are considered (Fig. 7). For each of them, the perturbation problem is solved and an iterative process is carried out till the relative error of the local electric field is smaller than 1%.

View Article: PubMed Central - PubMed

ABSTRACT

In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing region is close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.

No MeSH data available.