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A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.


The measured dynamic response of the rotor.
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f6-sensors-12-10881: The measured dynamic response of the rotor.

Mentions: The performance of the proposed actuation mechanism was also characterized by the dynamic response of the fabricated actuator. Through the capacitive coupling, the actuator was driven by a dc voltage (V2 = 5 volts) and an ac voltage (V1 = 20sinωt volt, where ω represents the radian frequency) in air. The dynamic behavior was observed using a MEMS motion analyzer, i.e., an in-plane strobe scope module. Figure 6 shows that the measured resonant frequency of the actuator—which was driven by the applied ac voltage with a frequency ranging from 300 to 1,000 Hz—is 577 Hz, which is close to the estimated value: 615 Hz. The dynamic response further demonstrates that the new actuation mechanism is feasible in dynamic actuation. Note that the difference between the theoretical and experimental results may result from the nonlinear relationship between the electrostatic force and the displacement x. However, the potential effects, such as spring hardening and softening, are out of scope of the current work and left to be a topic of future work.


A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

The measured dynamic response of the rotor.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472863&req=5

f6-sensors-12-10881: The measured dynamic response of the rotor.
Mentions: The performance of the proposed actuation mechanism was also characterized by the dynamic response of the fabricated actuator. Through the capacitive coupling, the actuator was driven by a dc voltage (V2 = 5 volts) and an ac voltage (V1 = 20sinωt volt, where ω represents the radian frequency) in air. The dynamic behavior was observed using a MEMS motion analyzer, i.e., an in-plane strobe scope module. Figure 6 shows that the measured resonant frequency of the actuator—which was driven by the applied ac voltage with a frequency ranging from 300 to 1,000 Hz—is 577 Hz, which is close to the estimated value: 615 Hz. The dynamic response further demonstrates that the new actuation mechanism is feasible in dynamic actuation. Note that the difference between the theoretical and experimental results may result from the nonlinear relationship between the electrostatic force and the displacement x. However, the potential effects, such as spring hardening and softening, are out of scope of the current work and left to be a topic of future work.

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.