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A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.


The estimated and measured displacements of the rotor. In this example, V2 was fixed at 10 volt, V1 was increased (from zero) to 72 volts.
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f5-sensors-12-10881: The estimated and measured displacements of the rotor. In this example, V2 was fixed at 10 volt, V1 was increased (from zero) to 72 volts.

Mentions: Figure 5 shows the relationship between the displacement of the rotor and the applied voltage. The displacement of the rotor was measured using a high resolution microscope (on the probe station). The experimental results agree well with the estimated ones. When the applied voltage (V1) was increased to 72 volts, the displacement approached to 41.7 μm. The static responses verify that without electrical interconnections the rotor still can be driven using the capacitively-coupled-power delivery mechanism.


A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

The estimated and measured displacements of the rotor. In this example, V2 was fixed at 10 volt, V1 was increased (from zero) to 72 volts.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472863&req=5

f5-sensors-12-10881: The estimated and measured displacements of the rotor. In this example, V2 was fixed at 10 volt, V1 was increased (from zero) to 72 volts.
Mentions: Figure 5 shows the relationship between the displacement of the rotor and the applied voltage. The displacement of the rotor was measured using a high resolution microscope (on the probe station). The experimental results agree well with the estimated ones. When the applied voltage (V1) was increased to 72 volts, the displacement approached to 41.7 μm. The static responses verify that without electrical interconnections the rotor still can be driven using the capacitively-coupled-power delivery mechanism.

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.