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A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.


The actuation of the proposed comb-drive actuator. (a) Before and (b) after voltages were applied onto the stators, the rotor was static and moved a distance.
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f4-sensors-12-10881: The actuation of the proposed comb-drive actuator. (a) Before and (b) after voltages were applied onto the stators, the rotor was static and moved a distance.

Mentions: The feasibility of the actuation mechanism was demonstrated by the operation of the comb-drive actuator. The voltages were only applied on the stators and the rotor was completely insulated. The handle layer was grounded to ensure that its voltage is zero. Before applying the dc voltages, the rotor was static, as shown in Figure 4(a). Increasing the dc voltage at only one stator, i.e., increasing V1, resulted in an increasing Fex, and thus the rotor motion (see Figure 4(b)).


A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

The actuation of the proposed comb-drive actuator. (a) Before and (b) after voltages were applied onto the stators, the rotor was static and moved a distance.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472863&req=5

f4-sensors-12-10881: The actuation of the proposed comb-drive actuator. (a) Before and (b) after voltages were applied onto the stators, the rotor was static and moved a distance.
Mentions: The feasibility of the actuation mechanism was demonstrated by the operation of the comb-drive actuator. The voltages were only applied on the stators and the rotor was completely insulated. The handle layer was grounded to ensure that its voltage is zero. Before applying the dc voltages, the rotor was static, as shown in Figure 4(a). Increasing the dc voltage at only one stator, i.e., increasing V1, resulted in an increasing Fex, and thus the rotor motion (see Figure 4(b)).

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.