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A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.


The fabricated comb-drive actuator with different initial overlaps. Here, n = 138, h = 50 μm, L = 1250 μm, b = 6 μm, g = 5 μm, a1 = 48.9 μm, a2 = 159.3 μm, Asus = 1.218 × 10−6 m2 and Aanch = 7.414 × 10−6 m2.
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f3-sensors-12-10881: The fabricated comb-drive actuator with different initial overlaps. Here, n = 138, h = 50 μm, L = 1250 μm, b = 6 μm, g = 5 μm, a1 = 48.9 μm, a2 = 159.3 μm, Asus = 1.218 × 10−6 m2 and Aanch = 7.414 × 10−6 m2.

Mentions: To verify the new actuation mechanism, we fabricated some comb-drive actuators using the one mask process based on the silicon-on-insulator (SOI) wafer with a device layer of 50 μm and a buried oxide layer of 4 μm. The structure of the comb drive actuator was patterned and etched by deep reactive-ion etching (DRIE), then released with hydrofluoric acid (HF) etching to remove the sacrificial oxide. Figure 3 shows a microscope image of the actuator with asymmetric initial overlaps.


A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

The fabricated comb-drive actuator with different initial overlaps. Here, n = 138, h = 50 μm, L = 1250 μm, b = 6 μm, g = 5 μm, a1 = 48.9 μm, a2 = 159.3 μm, Asus = 1.218 × 10−6 m2 and Aanch = 7.414 × 10−6 m2.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472863&req=5

f3-sensors-12-10881: The fabricated comb-drive actuator with different initial overlaps. Here, n = 138, h = 50 μm, L = 1250 μm, b = 6 μm, g = 5 μm, a1 = 48.9 μm, a2 = 159.3 μm, Asus = 1.218 × 10−6 m2 and Aanch = 7.414 × 10−6 m2.
Mentions: To verify the new actuation mechanism, we fabricated some comb-drive actuators using the one mask process based on the silicon-on-insulator (SOI) wafer with a device layer of 50 μm and a buried oxide layer of 4 μm. The structure of the comb drive actuator was patterned and etched by deep reactive-ion etching (DRIE), then released with hydrofluoric acid (HF) etching to remove the sacrificial oxide. Figure 3 shows a microscope image of the actuator with asymmetric initial overlaps.

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.