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A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.


Schematics of the comb-drive actuator with the actuation mechanism of capacitively-coupling-power supply. Different initial overlaps, a1 and a2, form different initial capacitances, C1 and C2. With the capacitance, Cr, which is formed between the rotor and the handle layer, a capacitive circuit is observed. Applying voltages, V1 and V2, onto the stators and grounding the handle layer, a voltage, Vr, will be induced at the rotor. As long as V1 and V2 are not the same, the rotor will be moved by the net electrostatic force generated by the comb electrodes.
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f1-sensors-12-10881: Schematics of the comb-drive actuator with the actuation mechanism of capacitively-coupling-power supply. Different initial overlaps, a1 and a2, form different initial capacitances, C1 and C2. With the capacitance, Cr, which is formed between the rotor and the handle layer, a capacitive circuit is observed. Applying voltages, V1 and V2, onto the stators and grounding the handle layer, a voltage, Vr, will be induced at the rotor. As long as V1 and V2 are not the same, the rotor will be moved by the net electrostatic force generated by the comb electrodes.

Mentions: To eliminate the drawback, a capacitively-coupled-power driven comb-drive actuator (see Figure 1), whose rotor requires no electrical interconnection, was proposed in this article. In the following sections, the concept and design of the actuator will be explained and analyzed first. Then, the tests for the fabricated actuators will be described, and the results will be discussed. Finally, the conclusions will be made.


A comb-drive actuator driven by capacitively-coupled-power.

Chang CM, Wang SY, Chen R, Yeh JA, Hou MT - Sensors (Basel) (2012)

Schematics of the comb-drive actuator with the actuation mechanism of capacitively-coupling-power supply. Different initial overlaps, a1 and a2, form different initial capacitances, C1 and C2. With the capacitance, Cr, which is formed between the rotor and the handle layer, a capacitive circuit is observed. Applying voltages, V1 and V2, onto the stators and grounding the handle layer, a voltage, Vr, will be induced at the rotor. As long as V1 and V2 are not the same, the rotor will be moved by the net electrostatic force generated by the comb electrodes.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472863&req=5

f1-sensors-12-10881: Schematics of the comb-drive actuator with the actuation mechanism of capacitively-coupling-power supply. Different initial overlaps, a1 and a2, form different initial capacitances, C1 and C2. With the capacitance, Cr, which is formed between the rotor and the handle layer, a capacitive circuit is observed. Applying voltages, V1 and V2, onto the stators and grounding the handle layer, a voltage, Vr, will be induced at the rotor. As long as V1 and V2 are not the same, the rotor will be moved by the net electrostatic force generated by the comb electrodes.
Mentions: To eliminate the drawback, a capacitively-coupled-power driven comb-drive actuator (see Figure 1), whose rotor requires no electrical interconnection, was proposed in this article. In the following sections, the concept and design of the actuator will be explained and analyzed first. Then, the tests for the fabricated actuators will be described, and the results will be discussed. Finally, the conclusions will be made.

Bottom Line: The results show that the actuator worked well using the proposed actuation mechanism.Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply.This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

View Article: PubMed Central - PubMed

Affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan. chaomin.chang@gmail.com

ABSTRACT
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps, i.e., 159.3 μm and 48.9 μm on each side, was fabricated and tested. The results show that the actuator worked well using the proposed actuation mechanism. A static displacement of 41.7 μm and a resonant frequency of 577 Hz were achieved. Using the actuation mechanism, no electrical connection is required between the rotor and the outside power supply. This makes some comb-drive actuators containing heterogeneous structures easy to design and actuate.

No MeSH data available.