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A four-quadrant PVDF transducer for surface acoustic wave detection.

Lu Z, Dorantes-Gonzalez DJ, Chen K, Yang F, Jin B, Li Y, Chen Z, Hu X - Sensors (Basel) (2012)

Bottom Line: In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure.In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source.The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No. 92, Tianjin 300072, China. zimo.lu@yahoo.cn

ABSTRACT
In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.

No MeSH data available.


Wave front of SAW on Si sample: (a) wave front excited by a point source, (b) wave front excited by a line source.
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f1-sensors-12-10500: Wave front of SAW on Si sample: (a) wave front excited by a point source, (b) wave front excited by a line source.

Mentions: Laser excitation is mainly divided into point source and line source excitation. Figure 1 shows the simulation of surface acoustic wave fronts propagation. Figure 1(a) shows a wave front flat pattern generated by a point laser source. From the figure, it could be seen that the wave front pattern is irregular, and if a linear wedge piezoelectric pressure probe is used to detect the point-source-generated surface acoustic wave, the detection line inevitably falls in different phase wave fronts, leading to detection signal loss of its original physical meaning [16]. Figure 1(b) shows a laser beam line source exciting a surface acoustic wave front flat pattern. As shown, the wave front is a somewhat regular straight line with a typical wave front flat pattern, hence indicating that using a linear wedge with a straight line to detect surface acoustic wave is suitable, and that's why SAW testing experimental systems usually use line source to stimulate the surface acoustic wave fronts [16].


A four-quadrant PVDF transducer for surface acoustic wave detection.

Lu Z, Dorantes-Gonzalez DJ, Chen K, Yang F, Jin B, Li Y, Chen Z, Hu X - Sensors (Basel) (2012)

Wave front of SAW on Si sample: (a) wave front excited by a point source, (b) wave front excited by a line source.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472840&req=5

f1-sensors-12-10500: Wave front of SAW on Si sample: (a) wave front excited by a point source, (b) wave front excited by a line source.
Mentions: Laser excitation is mainly divided into point source and line source excitation. Figure 1 shows the simulation of surface acoustic wave fronts propagation. Figure 1(a) shows a wave front flat pattern generated by a point laser source. From the figure, it could be seen that the wave front pattern is irregular, and if a linear wedge piezoelectric pressure probe is used to detect the point-source-generated surface acoustic wave, the detection line inevitably falls in different phase wave fronts, leading to detection signal loss of its original physical meaning [16]. Figure 1(b) shows a laser beam line source exciting a surface acoustic wave front flat pattern. As shown, the wave front is a somewhat regular straight line with a typical wave front flat pattern, hence indicating that using a linear wedge with a straight line to detect surface acoustic wave is suitable, and that's why SAW testing experimental systems usually use line source to stimulate the surface acoustic wave fronts [16].

Bottom Line: In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure.In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source.The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.

View Article: PubMed Central - PubMed

Affiliation: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No. 92, Tianjin 300072, China. zimo.lu@yahoo.cn

ABSTRACT
In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.

No MeSH data available.