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Fabrication of high sensitivity carbon microcoil pressure sensors.

Su CC, Li CH, Chang NK, Gao F, Chang SH - Sensors (Basel) (2012)

Bottom Line: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS).The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers.The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. r92522629@ntu.edu.tw

ABSTRACT
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.

No MeSH data available.


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Sensitivity of CMC pressure sensor vs. the growth yield of as-grown CMCs.
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f6-sensors-12-10034: Sensitivity of CMC pressure sensor vs. the growth yield of as-grown CMCs.

Mentions: The sensitivity of the CMC pressure sensor was defined thus: sensitivity of pressure sensor = ((ΔR/Rl) × 100%)/ΔP, where ΔR = Rh − Rl, Rh is the highest measured resistance, Rl is the lowest measured resistance, ΔP = Ph − Pl, Ph is the applied pressure of the highest measured resistance, and Pl is the applied pressure of the lowest measured resistance. Figure 6 shows the sensitivity of the CMC pressure sensor with different ratios of Fe-Sn catalyst. This result indicates that the Fe-Sn catalyst of 95:5 had a maximum sensitivity of 0.93%/kPa. The sensitivity of the CMC pressure sensor increased with increases in the yield of CMCs. As compared to other pressure sensors composed of micro-materials, the CMC pressure sensor in this work has the greatest sensitivity (Table 1). The sensitivity in this work is almost 10.3 times that reported in [4] (metallic single-walled carbon nanotube), 25.6 times that in [5] (multi-walled carbon nanotubes), and 15.1 times that in [6] (carbon fiber). The 3D structure of CMCs allowed a large amount of contact area, resulting in the greatest variation in contact resistance.


Fabrication of high sensitivity carbon microcoil pressure sensors.

Su CC, Li CH, Chang NK, Gao F, Chang SH - Sensors (Basel) (2012)

Sensitivity of CMC pressure sensor vs. the growth yield of as-grown CMCs.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472814&req=5

f6-sensors-12-10034: Sensitivity of CMC pressure sensor vs. the growth yield of as-grown CMCs.
Mentions: The sensitivity of the CMC pressure sensor was defined thus: sensitivity of pressure sensor = ((ΔR/Rl) × 100%)/ΔP, where ΔR = Rh − Rl, Rh is the highest measured resistance, Rl is the lowest measured resistance, ΔP = Ph − Pl, Ph is the applied pressure of the highest measured resistance, and Pl is the applied pressure of the lowest measured resistance. Figure 6 shows the sensitivity of the CMC pressure sensor with different ratios of Fe-Sn catalyst. This result indicates that the Fe-Sn catalyst of 95:5 had a maximum sensitivity of 0.93%/kPa. The sensitivity of the CMC pressure sensor increased with increases in the yield of CMCs. As compared to other pressure sensors composed of micro-materials, the CMC pressure sensor in this work has the greatest sensitivity (Table 1). The sensitivity in this work is almost 10.3 times that reported in [4] (metallic single-walled carbon nanotube), 25.6 times that in [5] (multi-walled carbon nanotubes), and 15.1 times that in [6] (carbon fiber). The 3D structure of CMCs allowed a large amount of contact area, resulting in the greatest variation in contact resistance.

Bottom Line: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS).The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers.The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. r92522629@ntu.edu.tw

ABSTRACT
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.

No MeSH data available.


Related in: MedlinePlus