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Fabrication of high sensitivity carbon microcoil pressure sensors.

Su CC, Li CH, Chang NK, Gao F, Chang SH - Sensors (Basel) (2012)

Bottom Line: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS).The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers.The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. r92522629@ntu.edu.tw

ABSTRACT
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.

No MeSH data available.


Related in: MedlinePlus

The yield ratio of as-grown CMCs vs. the different mass ratios of Fe-Sn catalytic solution.
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f3-sensors-12-10034: The yield ratio of as-grown CMCs vs. the different mass ratios of Fe-Sn catalytic solution.

Mentions: Figure 3 shows the yield of CMCs vs. various ratios of Fe-Sn catalyst from 80:20 to 97:3. The yield of CMCs with the concentration of Fe-Sn of 95:5 achieved 95%. The yield was defined as the mass ratio of synthesis of CMCs to the amount of CMCs and CNFs, which was calculated from areas of 100 × 100 μm in 100 SEM images. These CMCs had a fiber diameter of 100 to 300 nm, a coil diameter of 100 to 1,000 nm, and a pitch of 200 to 1,200 nm. The appropriate composition ratio of Fe and Sn is critical for producing CMC structures. The amount of Sn should be reduced to maintain the correct ratio of Fe to Sn [15]. Energy dispersive X-ray analysis of the catalyst particles within the CNC tips showed the existence of Fe and Sn with a ratio of about 19:1, which is consistent with the results reported in [16]. Therefore, the concentration of Fe-Sn of 95:5 gives the greatest yield of CMCs. The growth mechanism of CMCs is believed to be due to the difference between the carbon diffusion and extrusion speeds in different parts of the catalyst comprising various metals [17].


Fabrication of high sensitivity carbon microcoil pressure sensors.

Su CC, Li CH, Chang NK, Gao F, Chang SH - Sensors (Basel) (2012)

The yield ratio of as-grown CMCs vs. the different mass ratios of Fe-Sn catalytic solution.
© Copyright Policy
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472814&req=5

f3-sensors-12-10034: The yield ratio of as-grown CMCs vs. the different mass ratios of Fe-Sn catalytic solution.
Mentions: Figure 3 shows the yield of CMCs vs. various ratios of Fe-Sn catalyst from 80:20 to 97:3. The yield of CMCs with the concentration of Fe-Sn of 95:5 achieved 95%. The yield was defined as the mass ratio of synthesis of CMCs to the amount of CMCs and CNFs, which was calculated from areas of 100 × 100 μm in 100 SEM images. These CMCs had a fiber diameter of 100 to 300 nm, a coil diameter of 100 to 1,000 nm, and a pitch of 200 to 1,200 nm. The appropriate composition ratio of Fe and Sn is critical for producing CMC structures. The amount of Sn should be reduced to maintain the correct ratio of Fe to Sn [15]. Energy dispersive X-ray analysis of the catalyst particles within the CNC tips showed the existence of Fe and Sn with a ratio of about 19:1, which is consistent with the results reported in [16]. Therefore, the concentration of Fe-Sn of 95:5 gives the greatest yield of CMCs. The growth mechanism of CMCs is believed to be due to the difference between the carbon diffusion and extrusion speeds in different parts of the catalyst comprising various metals [17].

Bottom Line: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS).The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers.The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system.

View Article: PubMed Central - PubMed

Affiliation: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. r92522629@ntu.edu.tw

ABSTRACT
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.

No MeSH data available.


Related in: MedlinePlus