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The dual role of silver during silicon etching in HF solution.

Abouda-Lachiheb M, Nafie N, Bouaicha M - Nanoscale Res Lett (2012)

Bottom Line: In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures.Through our investigations, we tracked the silver particles that indicated which mechanism is involved.Characterizations of the prepared samples were made using a scanning electron microscope.

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Affiliation: Laboratoire de Photovoltaique, Centre de Recherches et des Technologies de l'Energie, Technopole de Borj-Cedria, BP 95, Hammam-Lif, Tunis, 2050, Tunisia. Mongi.Bouaicha@crten.rnrt.tn.

ABSTRACT
It was reported that during silicon etching, silver was subjected to have a controversial role. Some researchers debate that silver protects silicon, and, at the same time, other ones confirm that silver catalyzes silicon underneath. In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures. We give a proof that the role of silver depends on the experimental details and the intrinsic properties of silver during its deposition on the silicon wafer. Through our investigations, we tracked the silver particles that indicated which mechanism is involved. Characterizations of the prepared samples were made using a scanning electron microscope.

No MeSH data available.


Cross-section SEM image of sample C showing both protecting and catalyzing effect of Ag nanoparticles.
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Figure 7: Cross-section SEM image of sample C showing both protecting and catalyzing effect of Ag nanoparticles.

Mentions: According to our assumptions on the role of silver during the silicon etching, the one-step process starts during the 3 min in the HF/AgNO3 solution. The two-step process starts when the sample is immersed in sole aqueous HF solution, since silver nanoparticles are deposited in the HF/AgNO3 solution. In Figure 7, we give the cross-section SEM image of sample C (with silver nanoparticles) where we can see that no silver nanoparticles are found in the bottom of pores. However, the Ag nanoparticles are found on the top (white color) which confirms the one-step process. In addition, it is clear in our observation that silver nanoparticles start their catalyzing effect (the two-step mechanism) by digging silicon at depths of 1–2 μm.


The dual role of silver during silicon etching in HF solution.

Abouda-Lachiheb M, Nafie N, Bouaicha M - Nanoscale Res Lett (2012)

Cross-section SEM image of sample C showing both protecting and catalyzing effect of Ag nanoparticles.
© Copyright Policy - open-access
Related In: Results  -  Collection

License
Show All Figures
getmorefigures.php?uid=PMC3472321&req=5

Figure 7: Cross-section SEM image of sample C showing both protecting and catalyzing effect of Ag nanoparticles.
Mentions: According to our assumptions on the role of silver during the silicon etching, the one-step process starts during the 3 min in the HF/AgNO3 solution. The two-step process starts when the sample is immersed in sole aqueous HF solution, since silver nanoparticles are deposited in the HF/AgNO3 solution. In Figure 7, we give the cross-section SEM image of sample C (with silver nanoparticles) where we can see that no silver nanoparticles are found in the bottom of pores. However, the Ag nanoparticles are found on the top (white color) which confirms the one-step process. In addition, it is clear in our observation that silver nanoparticles start their catalyzing effect (the two-step mechanism) by digging silicon at depths of 1–2 μm.

Bottom Line: In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures.Through our investigations, we tracked the silver particles that indicated which mechanism is involved.Characterizations of the prepared samples were made using a scanning electron microscope.

View Article: PubMed Central - HTML - PubMed

Affiliation: Laboratoire de Photovoltaique, Centre de Recherches et des Technologies de l'Energie, Technopole de Borj-Cedria, BP 95, Hammam-Lif, Tunis, 2050, Tunisia. Mongi.Bouaicha@crten.rnrt.tn.

ABSTRACT
It was reported that during silicon etching, silver was subjected to have a controversial role. Some researchers debate that silver protects silicon, and, at the same time, other ones confirm that silver catalyzes silicon underneath. In this paper, we give experimental results arguing the dual role that silver has during the formation of silicon nanostructures. We give a proof that the role of silver depends on the experimental details and the intrinsic properties of silver during its deposition on the silicon wafer. Through our investigations, we tracked the silver particles that indicated which mechanism is involved. Characterizations of the prepared samples were made using a scanning electron microscope.

No MeSH data available.